Trench MOSFET with increased channel density
6 Assignments
0 Petitions
Accused Products
Abstract
A MOSFET device (50) has a trench (60) extending from a major surface (56) of the device (50). Within the trench (60), a gate structure (62) is formed where the top surface (64) is below the major surface(56). Source regions (66, 68) are formed along a vertical wall (84) inside of the trench (60). The source regions (66, 68) have a horizontal component along the major surface (56) and a vertical component extending the vertical wall (84). The majority of the source regions (66, 68) are formed along the vertical wall (84) within the trench (60). A typical aspect ratio of the vertical length of the source regions (66, 68) to the horizontal width is greater than 3:1. An Inter-layer dielectric (ILD) layer (74) is formed on the gate structure (62) within the trench (60) below the major surface (56). A metal electrode layer (82) is formed above the major surface (56) where a portion is formed inside the trench (60) making source contact to the source regions (66, 68) inside the trench (60) along the vertical wall (84) of the trench (60).
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Citations
41 Claims
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1-21. -21. Cancelled
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22. A method for forming a semiconductor device having a major surface, comprising:
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providing a semiconductor material body having a trench with a vertical side, wherein the trench extends from the major surface to a depth within the semiconductor material body;
forming a gate structure having a top surface within the trench, wherein the top surface of the gate structure is below the major surface;
forming a source region along the vertical side of the trench, wherein the vertical side of the source region inside the trench is greater than a horizontal width of the source region along the major surface of the semiconductor material body; and
forming a conductive electrode layer on the major surface making contact with the source region along its vertical side. - View Dependent Claims (23, 24, 25)
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26. A method of making a semiconductor device comprising the steps of:
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providing a semiconductor material body having a trench extending from a major surface to a depth within the semiconductor material body;
forming a source region vertically along a sidewall of the trench above the gate structure and below the major surface of the semiconductor material body;
forming a gate structure within the trench; and
forming an interlayer dielectric (ILD) region within the trench above the gate structure and below the major surface of the semiconductor material body. - View Dependent Claims (27, 28, 29, 30)
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31. A process for forming a semiconductor device having a major surface comprising the steps of:
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providing a first region of semiconductor material having a first conductivity type and a second region of a second conductivity type disposed above the first region;
forming a trench extending vertically from the major surface through the second region;
forming a third region of the first conductivity type in the second region having a vertical component along the trench, wherein the vertical component of the third region along the trench is greater than a horizontal component of the third region; and
forming a conductive electrode layer formed below the major surface making contact to the third region inside the trench along the vertical component of the third region of the semiconductor device. - View Dependent Claims (32, 33, 34, 35, 36, 37, 38, 39, 40, 41)
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Specification