Optical element having minute periodic structure

• US 20050036212A1
• Filed: 08/09/2004
• Published: 02/17/2005
• Est. Priority Date: 08/13/2003
• Status: Active Grant

• Current Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Original Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Inventors: Saito, Hiroshi
• Granted Patent: US 7,023,630 B2
• Time in Patent Office: Days
• US Class Current: 359/708
• CPC Class Codes: G02B 5/1814 structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings G02B5/189 takes precedence

Abstract

An optical element is disclosed which is resistant to changes in environmental characteristics such as temperature and humidity and achieves a stable and favorable reflection suppressing effect. The optical element has a base member and a resin layer which is formed on the base member and has a linear expansion coefficient different from that of the base member. The resin layer has a minute periodic structure which has a period smaller than the wavelength of incident light on the optical element.

Claims

1. An optical element comprising:

a base member; and

a resin layer which is formed on the base member and has a linear expansion coefficient different from a linear expansion coefficient of the base member,

wherein the resin layer has a minute periodic structure which has a period smaller than a wavelength of incident light on the optical element.

2. The optical element according to claim 1, wherein the base member is made of glass.

3. The optical element according to claim 1, wherein the resin layer has an aspherical surface on which the minute periodic structure is formed.

4. The optical element according to claim 1, wherein the base member has a spherical surface on which the resin layer is formed.

5. The optical element according to claim 1, wherein the resin layer is formed on the base member together with the minute periodic structure in a replica method.

6. The optical element according to claim 1, wherein the minute periodic structure is a two-dimensionally periodic structure.

7. The optical element according to claim 3, wherein the following condition is satisfied:

20°

<

θ

<

90°

where, when R represents an approximate radius of curvature of the aspherical surface in the resin layer, θ

represents an angle between maximum effective portions of the optical element, which is viewed from a center of the approximate radius of curvature R, and the approximate radius of curvature refers to a radius of curvature of a circle defined by a center of the aspherical surface and a point including an effective maximum peripheral portion.

8. The optical element according to claim 1, wherein the minute periodic structure has parameters of respective structure portions which are changed continuously or step by step from a center toward a periphery of the optical element.

9. The optical element according to claim 1, wherein at least one of the following conditions is satisfied:

0.01<

|nd1-nd2|<

0.5
0.5<

|vd1-vd2|<

40

where nd1 and nd2 represent refractive indexes of the resin layer and the base member for a d-line, respectively, and vd1 and vd2 represent Abbe numbers of the resin layer and the base material for the d-line, respectively.

10. The optical element according to claim 1, wherein the following condition is satisfied:

100 nm<

P<

350 nm

where P represents the period of the minute periodic structure.

11. An optical system comprising:

the optical element according to claim 1.

12. An optical apparatus comprising:

an optical system which has the optical element according to claim 1.