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Transition metal alloys for use as a gate electrode and devices incorporating these alloys

  • US 20050037557A1
  • Filed: 08/15/2003
  • Published: 02/17/2005
  • Est. Priority Date: 08/15/2003
  • Status: Active Grant
First Claim
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1. An alloy comprising:

  • approximately 20 to 50 atomic percent of a transition metal, the transition metal selected from a group consisting of titanium, zirconium, tantalum, and hafnium;

    approximately 30 to 60 atomic percent of carbon; and

    up to approximately 20 atomic percent of aluminum.

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