Plasma processing method
First Claim
1. A plasma processing method for plasma processing a specimen by a plasma processing apparatus including a plasma generating unit, a process chamber capable of having an inside pressure thereof reduced, a process gas supply unit for supplying gas to the process chamber, a specimen table for holding a specimen, and a vacuum pumping unit, wherein the process chamber includes an outer cylinder having the capability of withstanding a reduced pressure, and an inner cylinder arranged inside the outer cylinder, the inner cylinder being made of non-magnetic material and being replaceable, the method comprising:
- monitoring a temperature of the inner cylinder;
comparing a desired inner cylinder temperature which is inputted in advance in response to a processing condition of the specimen with the monitored temperature of the inner cylinder; and
controlling the inner cylinder temperature to a predetermined value by controlling a temperature of the outer cylinder in response to a result of the comparison.
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Abstract
A plasma processing method utilizing a plasma processing apparatus having a plasma generating unit, a process chamber including an outer cylinder for withstanding a reduced pressure, and an inner cylinder made of non-magnetic material and being replaceable arranged inside the outer cylinder, a process gas supply unit for supplying gas to the process chamber, a specimen table for holding a specimen and a vacuum pumping unit. A temperature of the inner cylinder is monitored, and a desired inner cylinder temperature which is inputted in advance in response to a processing condition of the specimen is compared with the monitored temperature of the inner cylinder. A temperature of the outer cylinder is controlled in response to a result of the comparison so as to control the inner cylinder temperature to a predetermined value.
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Citations
33 Claims
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1. A plasma processing method for plasma processing a specimen by a plasma processing apparatus including a plasma generating unit, a process chamber capable of having an inside pressure thereof reduced, a process gas supply unit for supplying gas to the process chamber, a specimen table for holding a specimen, and a vacuum pumping unit, wherein the process chamber includes an outer cylinder having the capability of withstanding a reduced pressure, and an inner cylinder arranged inside the outer cylinder, the inner cylinder being made of non-magnetic material and being replaceable, the method comprising:
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monitoring a temperature of the inner cylinder;
comparing a desired inner cylinder temperature which is inputted in advance in response to a processing condition of the specimen with the monitored temperature of the inner cylinder; and
controlling the inner cylinder temperature to a predetermined value by controlling a temperature of the outer cylinder in response to a result of the comparison. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A plasma processing method for plasma processing a specimen by a plasma processing apparatus including a plasma generating unit, a process chamber capable of having an inside pressure thereof reduced, a process gas supply unit for supplying gas to the process chamber, a specimen table for holding a specimen, and a vacuum pumping unit, wherein the process chamber includes an outer cylinder having the capability of withstanding a reduced pressure, and an inner cylinder arranged inside the outer cylinder, the inner cylinder being made of non-magnetic material and being replaceable, the method comprising:
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monitoring a temperature of the inner cylinder is monitored;
comparing, when a specimen having a multi-layer film structure is processed, a desired inner cylinder temperature which is inputted in advance in response to a film quality of each of the films of the multi-layer film structure, a type of processing gas and an electrical discharging condition with the monitored temperature of the inner cylinder; and
controlling the inner cylinder temperature to a predetermined value by controlling a temperature of the outer cylinder in response to a result of the comparison. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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17. A plasma processing method for plasma processing a specimen by a plasma processing apparatus including a plasma generating unit, a process chamber capable of having an inside pressure thereof reduced, a process gas supply unit for supplying gas to the process chamber, a specimen table for holding a specimen, and a vacuum pumping unit, wherein the process chamber includes an outer cylinder having the capability of withstanding a reduced pressure, and an inner cylinder arranged inside the outer cylinder, the inner cylinder being made of non-magnetic material and being replaceable, the method comprising:
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monitoring a temperature of the inner cylinder;
comparing a desired inner cylinder temperature which is inputted in advance in response to a processing condition of a lot of the specimens with the monitored temperature of the inner cylinder; and
controlling a temperature of the outer cylinder in response to a result of the comparison so as to correct a variation in initial processing of the lot by changing the inner cylinder temperature at the initial stage of processing of the lot. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24)
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25. A plasma processing method for plasma processing a specimen by a plasma processing apparatus including a plasma generating unit, a process chamber capable of having an inside pressure thereof reduced, a process gas supply unit for supplying gas to the process chamber, a specimen table for holding a specimen, and a vacuum pumping unit, wherein the process chamber includes an outer cylinder having the capability of withstanding a reduced pressure, and an inner cylinder arranged inside the outer cylinder, the inner cylinder being made of non-magnetic material and being replaceable, the method comprising:
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monitoring a temperature of the inner cylinder;
comparing a desired inner cylinder temperature pattern which is inputted in advance in response to a processing condition of a lot of the specimens with the monitored temperature of the inner cylinder; and
controlling of a temperature of the outer cylinder in response to a result of the comparison so as to make a processing performance of the specimen during one lot processing constant by controlling the inner cylinder temperature during the one lot processing. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32)
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33. A plasma processing method utilizing a plasma processing apparatus including a plasma generating unit, a process chamber capable of having an inside pressure thereof reduced, a process gas supply unit for supplying gas to the process chamber, a specimen table for holding a specimen, a controller, and a vacuum pumping unit, wherein the process chamber includes an outer cylinder having the capability of withstanding a reduced pressure, and an inner cylinder arranged inside the outer cylinder, wherein the inner cylinder being made of non-magnetic material and being replaceable, the method comprising:
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carrying out a cleaning processing under utilization of a cleaning gas plasma one of before plasma processing of the specimen, during plasma processing for a plurality of specimens and after plasma processing for the specimen;
monitoring a temperature of the inner cylinder after the cleaning processing and before starting of the plasma processing for the specimen; and
controlling a temperature of the outer cylinder in response to a result of the monitoring so as to control a temperature of the inner cylinder to a predetermined value.
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Specification