Method of using a sensor gas to determine erosion level of consumable system components
First Claim
1. A method of monitoring erosion of a system component in a plasma processing system, the method comprising:
- exposing a system component having a gas emitter to a plasma process; and
monitoring the plasma processing system for release of a sensor gas from the gas emitter during said process to determine erosion of the system component.
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Abstract
A method and system are provided for monitoring erosion of system components in a plasma processing system. The system components contain a gas emitter that can release a sensor gas into a plasma process environment. The sensor gas can produce characteristic fluorescent light emission when exposed to a plasma. The method can evaluate erosion of system components in a plasma, by monitoring fluorescent light emission and a mass signal from the sensor gas. Consumable system components that can be monitored using the method include rings, shields, electrodes, baffles, and liners.
30 Citations
51 Claims
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1. A method of monitoring erosion of a system component in a plasma processing system, the method comprising:
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exposing a system component having a gas emitter to a plasma process; and
monitoring the plasma processing system for release of a sensor gas from the gas emitter during said process to determine erosion of the system component. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 48, 49)
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15. A method of monitoring system component status in a plasma processing system, the method comprising:
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exposing a system component having a gas emitter to a plasma, wherein the gas emitter contains a sensor gas capable of fluorescent light emission when released from the gas emitter and exposed to the plasma; and
monitoring fluorescent light emission from the plasma processing system during a process, the monitoring including using an optical monitoring system to detect a wavelength and an intensity level of the fluorescent light emission, identifying the system component from the wavelength of the fluorescent light emission, and arriving at a determination of erosion level of the system component.
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16. A method of monitoring system component status in a plasma processing system, the method comprising:
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exposing a system component having a gas emitter to a plasma, wherein the gas emitter contains a sensor gas; and
monitoring a mass signal from a sensor gas in the plasma processing system during a process, the monitoring including using a mass sensor to detect the mass signal and an intensity level of the mass signal, identifying the system component from the mass signal, and arriving at a determination of erosion level of the system component.
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17. A plasma processing system, comprising:
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a plasma processing chamber;
a plasma source configured to create a plasma from a process gas;
a system component having a gas emitter, wherein the gas emitter contains a sensor gas;
a monitoring system configured to monitor for the release of the sensor gas from the gas emitter to determine erosion level of the system component; and
a controller configured to control the plasma processing system. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 50, 51)
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30. A plasma processing system, comprising:
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a plasma processing chamber;
a plasma source configured to create a plasma from a process gas;
a system component having a gas emitter, wherein the gas emitter contains a sensor gas capable of fluorescent light emission when exposed to a plasma;
an optical monitoring system for monitoring light emission from the plasma processing chamber during processing to monitor erosion level of the system component, wherein the optical monitoring system is further configured to identify the system component from a wavelength of the fluorescent light emission, to determine if an intensity level of the fluorescent emission exceeds a threshold value, to determine if the system component needs to be replaced, and based on the determination, either continue with the process or stop the process; and
a controller configured to control the plasma processing system.
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31. A plasma processing system, comprising:
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a plasma processing chamber;
a plasma source configured to create a plasma from a process gas;
a system component having a gas emitter, wherein the gas emitter contains a sensor gas;
a mass sensor for monitoring a mass signal from the plasma processing chamber during processing to monitor erosion level of the system component;
wherein the mass sensor is further configured to identify the system component from the mass signal, to determine if an intensity level of the mass signal exceeds a threshold value, to determine if the system component needs to be replaced, and based on the determination, either continue with the process or stop the process; and
a controller configured to control the plasma processing system.
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32. A monitorable consumable system component, comprising:
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a system element that is consumed during processing performed by the system; and
a gas emitter containing a sensor gas coupled to the system element. - View Dependent Claims (33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47)
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Specification