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Electrical x-talk shield for MEMS micromirrors

  • US 20050041916A1
  • Filed: 05/21/2004
  • Published: 02/24/2005
  • Est. Priority Date: 05/28/2002
  • Status: Active Grant
First Claim
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1. A micro-electro-mechanical device mounted on a substrate comprising:

  • a first pivoting member pivotally mounted above the substrate;

    a second pivoting member pivotally mounted above the substrate adjacent the first pivoting member;

    a first electrode for actuating the first pivoting member;

    a second electrode positioned proximate the first electrode for actuating the second pivoting member;

    a first shield positioned between the first and second electrodes extending upwardly above an upper surface of the first electrode for shielding the first pivoting member from fringing electric fields from the second electrode.

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