Optical interference display panel and manufacturing method thereof
First Claim
1. A method for manufacturing an optical interference display panel, comprising:
- providing a substrate having a micro electro mechanical structure, wherein the micro electro mechanical structure comprises;
a first electrode, on the substrate;
a sacrificial layer, on the first electrode;
a second electrode, on the sacrificial layer; and
a plurality of supports, located between the first electrode and the second electrode;
adhering the substrate to a protection structure with a first adhesive to form a cavity for enclosing the micro electro mechanical structure, wherein a sidewall of the cavity has at least one opening; and
removing the sacrificial layer by a release etching process with an etching reagent through the opening to form an optical interference reflection structure.
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Accused Products
Abstract
A first electrode and a sacrificial layer are sequentially formed on a substrate, and then first openings for forming supports inside are formed in the first electrode and the sacrificial layer. The supports are formed in the first openings, and then a second electrode is formed on the sacrificial layer and the supports, thus forming a micro electro mechanical system structure. Afterward, an adhesive is used to adhere and fix a protection structure to the substrate for forming a chamber to enclose the micro electro mechanical system structure, and at least one second opening is preserved on sidewalls of the chamber. A release etch process is subsequently employed to remove the sacrificial layer through the second opening in order to form cavities in an optical interference reflection structure. Finally, the second opening is closed to seal the optical interference reflection structure between the substrate and the protection structure.
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Citations
14 Claims
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1. A method for manufacturing an optical interference display panel, comprising:
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providing a substrate having a micro electro mechanical structure, wherein the micro electro mechanical structure comprises;
a first electrode, on the substrate;
a sacrificial layer, on the first electrode;
a second electrode, on the sacrificial layer; and
a plurality of supports, located between the first electrode and the second electrode;
adhering the substrate to a protection structure with a first adhesive to form a cavity for enclosing the micro electro mechanical structure, wherein a sidewall of the cavity has at least one opening; and
removing the sacrificial layer by a release etching process with an etching reagent through the opening to form an optical interference reflection structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An optical interference display panel, comprising:
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a substrate;
a protection structure situated in parallel with the substrate substantially;
a micro electro mechanical structure having a sacrificial layer between a first electrode and a second electrode of the micro electro mechanical structure; and
an adhesive, adhering the protection structure to the substrate to form at least one cavity for enclosing the micro electro mechanical structure, wherein a sidewall of the cavity has an opening for input of an etching reagent used to remove the sacrificial layer and form an optical interference reflection structure. - View Dependent Claims (10, 11, 12, 13, 14)
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Specification