Optical interference display panel and manufacturing method thereof

• US 20050042117A1
• Filed: 03/24/2004
• Published: 02/24/2005
• Est. Priority Date: 08/18/2003
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm, Inc.
• Inventors: Lin, Wen-Jian
• Granted Patent: US 7,532,385 B2
• Time in Patent Office: Days
• US Class Current: 417/413.300
• CPC Class Codes: B81B 2201/045 Optical switches
• CPC Class Codes: B81B 7/0012 Protection against reverse engineering, unauthorised use, use in unintended manner, wrong insertion or pin assignment
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

A first electrode and a sacrificial layer are sequentially formed on a substrate, and then first openings for forming supports inside are formed in the first electrode and the sacrificial layer. The supports are formed in the first openings, and then a second electrode is formed on the sacrificial layer and the supports, thus forming a micro electro mechanical system structure. Afterward, an adhesive is used to adhere and fix a protection structure to the substrate for forming a chamber to enclose the micro electro mechanical system structure, and at least one second opening is preserved on sidewalls of the chamber. A release etch process is subsequently employed to remove the sacrificial layer through the second opening in order to form cavities in an optical interference reflection structure. Finally, the second opening is closed to seal the optical interference reflection structure between the substrate and the protection structure.

Claims

1. A method for manufacturing an optical interference display panel, comprising:

providing a substrate having a micro electro mechanical structure, wherein the micro electro mechanical structure comprises;

a first electrode, on the substrate;

a sacrificial layer, on the first electrode;

a second electrode, on the sacrificial layer; and

a plurality of supports, located between the first electrode and the second electrode;

adhering the substrate to a protection structure with a first adhesive to form a cavity for enclosing the micro electro mechanical structure, wherein a sidewall of the cavity has at least one opening; and

removing the sacrificial layer by a release etching process with an etching reagent through the opening to form an optical interference reflection structure.

2. The method of claim 1, wherein a material of the first adhesive comprises spacers, and the spacers keep a predetermined distance between the protection structure and the substrate to prevent the protection structure from damaging the optical interference reflection structure.

3. The method of claim 1, wherein the first adhesive comprises a UV glue or a thermosetting adhesive.

4. The method of claim 1, wherein the method further comprises:

closing the opening after finishing the release etching process.

5. The method of claim 4, wherein the opening is closed by filling with a second adhesive.

6. The method of claim 5, wherein the second adhesive comprises a UV glue or a thermosetting adhesive.

7. The method of claim 1, wherein the protection structure is a flat protection structure or a U-shaped protection structure.

8. The method of claim 1, wherein the protection structure is a U-shaped protection structure, and the opening is positioned on a sidewall of the U-shaped protection structure.

9. An optical interference display panel, comprising:

a substrate;

a protection structure situated in parallel with the substrate substantially;

a micro electro mechanical structure having a sacrificial layer between a first electrode and a second electrode of the micro electro mechanical structure; and

an adhesive, adhering the protection structure to the substrate to form at least one cavity for enclosing the micro electro mechanical structure, wherein a sidewall of the cavity has an opening for input of an etching reagent used to remove the sacrificial layer and form an optical interference reflection structure.

10. The optical interference display panel of claim 9, wherein the micro electro mechanical structure further comprises:

a plurality of supports, located in the sacrificial layer, for supporting the first electrode and the second electrode.

11. The optical interference display panel of claim 9, wherein the protection structure is a flat protection structure or a U-shaped protection structure.

12. The optical interference display panel of claim 9, wherein the protection structure is a U-shaped protection structure, and the opening is positioned on a sidewall of the U-shaped protection structure.

13. The optical interference display panel of claim 9, wherein he adhesive comprises spacers, and the spacers keep a predetermined distance between the protection structure and the substrate to prevent the protection structure from damaging the optical interference reflection structure.

14. The optical interference display panel of claim 9, wherein the adhesive comprises a UV glue or a thermosetting adhesive.