REACTANT NOZZLES WITHIN FLOWING REACTORS

• US 20050042152A1
• Filed: 04/10/2002
• Published: 02/24/2005
• Est. Priority Date: 04/10/2002
• Status: Active Grant

• Current Assignee: NeoPhotonics Corporation (Lumentum Holdings Inc.)
• Original Assignee: Nanogram Corporation (Teijin Limited)
• Inventors: Mosso, Ronald J., Gardner, James T., Gilliam, James A.
• Granted Patent: US 6,919,054 B2
• Time in Patent Office: Days
• US Class Current: 422/186.300
• CPC Class Codes: B01J 19/121 Coherent waves, e.g. laser beams lasers per se H01S3/00
• CPC Class Codes: B01J 19/127 Sunlight; Visible light
• CPC Class Codes: B01J 19/26 Nozzle-type reactors, i.e. the distribution of the initial reactants within the reactor is effected by their introduction or injection through nozzles

Abstract

Improved reaction chamber designs are described that provide for improved control over the flow within the reaction chamber. The reaction chambers contain reactions for particle production from a flowing reactant stream. Improved reactant delivery nozzles are described that are useful for the delivery of gas/vapor reactants and/or aerosol reactants. Improved nozzle designs can result in more uniform reactant flow. Suitable reactors can comprise an electromagnetic radiation source that projects through the reactor to drive the reaction at an electromagnetic radiation reaction zone. The improved nozzle features are suitable for reactors for particle collection and/or for coating of substrates within the reaction chamber.

Claims

1. A reactor comprising a main chamber, a radiation source and a reactant source comprising a reactant inlet nozzle, the reactant inlet nozzle coding an inlet slot opening into the man chamber elongated in one direction relative to an orthogonal direction, thereof and an elongated throat baffle operably connected to the inlet slot that modulates a flow of reactants into the inlet slot, the radiation source bee oriented to dirt radiation through the main chamber to intersect with a reactant stream path from the reactant inlet nozzle.

2. The reactor of claim 1 wherein the chamber comprises a cross section perpendicular to the flow direction from an opening of the reactant inlet that has an elongated dimension relative to the orthogonal direction, wherein the elongated dimension of the main chamber is aligned with the elongated dimension of the nozzle.

3. The reactor of claim 1 wherein the reactant source comprises a plurality of compositions that are in one or more containers operably connected to the nozzle for the delivery of the compositions into the nozzle.

4. The reactor of claim 3 wherein the one or more containers supply vapor to the nozzle.

5. The reactor of claim 3 wherein at least one of the compositions comprises a silicon precursor composition.

6. The reactor of claim 1 wherein the reactant source comprises a aerosol generator configured to deliver an aerosol to the mat chamber through the reactant inlet nozzle.

7. The reactor of claim 1 wherein the length of opening of the inlet slot along the elongated direction is at least a factor of five larger than the orthogonal dimension of the opening.

8. The reactor of claim 1 further comprising a shielding gas opening operably connected to an inert gas source.

9. The reactor of claim 8 wherein the shielding gas op is adjacent to the opening of the reactant inlet slot.

10. The reactor of claim 1 wherein the throat baffle comprises a projection inserted part way into the inlet slot.

11. The reactor of claim 1 wherein the throat baffle comprises a flat surface below the inlet slot.

12. The rector of claim 1 wherein the throat baffle comprises a trough below the inlet slot.

13. The reactor of claim 1 wherein the radiation source comprises a light source and optical components.

14. The reactor of claim 13 wherein the light source comprises an infrared laser.

15. The reactor of claim 1 further comprising a coating surface within the main chamber.

16. The reactor of claim 15 wherein the coating surface is operably capable of moving relative to the inlet slot opening.

17. The reactor of claim 16 wherein the length of the inlet slot opening along the elongated direction is larger than a dimension across the coating surface orthogonal to the direction of movement relative to the reactant inlet opening and wherein intersection of the radiation and the reactants results in a product stream path wherein the coating surface is operably capable of moving through the product stream path with straight motion of the coating surface operably capable of moving the entire coating surface through the product stream path.

18. The reactor of claim 17 wherein the coating surface has a dimension across the coating surface of at least about five inches.

19. The reactor of claim 18 wherein the radiation source is configured to direct radiation along the elongated direction of the reactant inlet nozzle.

20. A reactor comprising a main chamber, a radiation source and a react delivery system comprising a reactant inlet nozzle opening into the main chamber wherein the inlet nozzle comprises a group of at least three aligned elongated inlets opening into the main chamber and wherein the elongated inlets are connected to reactant supplies generating increasing reactant velocities emanating from successive inlets when proceeding from the center of the group of aligned inlets to outer inlets, the radiation source being oriented to direct radiation through the main chamber along an elongated direction of the inlet opening to intersect with a reactant stream path from the reactant inlet nozzle.

21. The reactor of claim 20 wherein each of the elongated inlets into the reaction chamber is elongated with a length along its respective elongated dimension at least about a factor of five greater than orthogonal dimension of the respective elongated inlet.

22. The reactor of claim 20 wherein the main chamber comprises side walls adjacent the surface with the inlet nozzle, wherein the side walls are oriented along the elongated dimension of the reactant inlet nozzle opening, the side walls being angled inward toward each other in a direction orthogonal to the elongated direction reducing a dimension of the reaction chamber with increasing distance from the reactant delivery nozzle.

23. The reactor of claim 22 wherein the angled walls are planar.

24. The reactor of claim 22 wherein the angled walls are curved.

25. The reactor of claim 20 wherein the reactant inlet nozzle is operably connected to a vapor react source.

26. The reactor of claim 20 wherein the group of aligned inlets comprises at least five aligned elongated inlets.

27. The reactor of claim 20 wherein at least two elongated inlets symmetrically placed about the center of the group of elongated inlets are connected to both an inert gas source and a gas/vapor reactant source.

28. The reactor of claim 20 wherein at least one elongated inlet is operably connected to an aerosol generator.

29. The reactor of claim 28 wherein the at least one elongated inlet is further operably connected to a gas source wherein gas from the gas source entrains aerosol from the aerosol generator.

30. A reactor comprising a mans chamber, a radiation source and a reactant delivery apparatus comprising a reactant inlet nozzle, wherein the reactant inlet nozzle comprises a plurality of inlets opening into the main chamber and a plurality of positionable slot plates separated by spacers to form desired slot dimension(s) and wherein the slot plates form the plurality of inlets, the radiation source being oriented to direct radiation through the main chamber to intersect with a reactant stream path from the reactant inlet nozzle.

31. The reactor of claim 30 wherein the plurality of slot plates comprises at least four slot plates.

32. The reactor of claim 30 where the plurality of slot plates are separated from each other with an air tight seal with a defined opening that leads between each pair of slot plates.

33. The reactor of claim 32 wherein at least one of the inlets is operably connected to a source of reactant precursor.

34. The reactor of claim 33 wherein the source of reactant precursor comprises a vapor precursor source.

35. The reactor of claim 33 wherein the source of reactant precursor comprises an aerosol generator.

36. The reactor of claim 32 wherein at least two of the inlets are operably connected to a source of inert gas.

37. The reactor of claim 30 wherein the slot plates are elongated in one dimension relative to an orthogonal dimension thereof to form inlets with a length at least about five times larger than an orthogonal dimension of the inlets.

38. The reactor of claim 30 wherein the number of slot plates can be changed to alter the number of inlets.

39. A reactor comprising a main chamber, a radiation source and a reactant delivery apparatus comprising a reactant source that comprises a reactant inlet nozzle, the reactant inlet nozzle comprising an inlet opening into the main chamber elongated in one dimension relative to an orthogonal dimension thereof, the reactant inlet nozzle being tapered in the direction leading to the inlet opening to reduce a dimension of a flow path corresponding to the elongated direction of the inlet, the ration source being oriented to direct radiation through the main chamber to intersect with a reactant stream path from the reactant inlet nozzle.

40. The reactor of claim 39 wherein the reactant inlet nozzle comprises wedge shaped projections projecting in a direction generally opposite a flow direction, the flow direction being toward the inlet opening, the wedge shaped projections comprising angled sides leading to the elongated dimension of the inlet.

41. The reactor of claim 40 wherein the wedge shaped projections are spaced away from a wall of the reactant inlet nozzle to form a baffle gap between the projection and the wall that does not connect to the inlet opening.

42. The reactor of claim 41 wherein the wedge shaped projections comprise a cross section parallel to the flow direction toward the inlet opening that is triangular.

43. The reactor of claim 42 wherein a side of the triangular cross section of the projections facing the nearest wall of the reactant inlet nozzle is roughly perpendicular to the wail of the reactant inlet nozzle.

44. The reactor of claim 41 wherein each of the projections comprises a curved face.

45. The reactor of claim 41 wherein each of the edges of the nozzle comprises a hyperbolic shaped edge along a cross section leading to the elongated edge of the inlet.

46. The reactor of claim 39 wherein the reactant source comprises an aerosol generator that directs aerosol toward the inlet opening.

47. The reactor of claim 46 wherein the reactant source comprises a vapor precursor source.

48. The reactor of claim 39 wherein the radiation source is oriented to direct radiation along the elongated direction of the nozzle.

49. A reactor comprising a main chamber, a radiation source and a reactant source coming a reactant inlet nozzle that comprises a flow grid and a channel from a reactant precursor source to a reactant inlet opening into the main chamber, the flow grid being operably connected to the channel wherein the flow god divides a flow at the reactant inlet opening into a plurality of divided flows, the radiation source being oriented to direct radiation through the main chamber to intersect with a reactant stream path from the reactant inlet nozzle.

50. The reactor of claim 49 wherein the reactant inlet is elongated in one dimension relative to an orthogonal direction thereof.

51. The reactor of claim 50 wherein the flow grid comprises slots on a rectangular grid.

52. The reactor of claim 49 further comprising a shielding gas channel leading to a shielding gas inlet, the shielding gas channel coning a flow grid.

53. A reactor comprising a main chamber, a radiation source and a reactant source comprising a reactant inlet nozzle at comprises a channel leading to a reactant inlet that opens into the main chamber, the reactant inlet comprising structure that defines an elongated length and a width having an aspect ratio of at least about 50, the radiation source being oriented to direct radiation through the main chamber to intersect with a reactant stream path from the reactant inlet nozzle.

54. The reactor of claim 53 wherein the radiation source comprises a light source and optical components oriented to project light torn the fight source along a light beam path through the main chamber to intersect a reactant steam from the reactant inlet wherein the light beam path is oriented along a direction corresponding to the elongated dimension of the opening.

55. A reactor comprising a main chamber, a radiation source and a reactant source comprising a reactant inlet nozzle that comprises a channel leading to a reactant inlet that opens into the main chamber, the reactant inlet comprising structure that defines an opening with an elongated dimension and a width that varies along the elongated dimension in which the width is greater near the ends of the elongated dimension than at the center of the elongated dimension, the radiation source being oriented to direct radiation through the main chamber along the elongated direction of the opening to intersect with a reactant steam path from the reactant inlet nozzle.

56. The reactor of claim 55 here the shape of the reactant inlet provides approximately uniform mass flow along the elongated dimension of the reactant inlet.

57. A reactor comprising a main chamber, a radiation source and a source comprising a reactant inlet that opens into the mar chamber, the reactant inlet being elongated in one dimension relative to an orthogonal dimension thereof with the elongated dimension of the reactant inlet being at least about 5 centimeters and the reactant inlet generating a reactant stream with a velocity along the length of the inlet that at each position differs in magnitude from the average velocity by no more than about 50% of the average of the velocity of flows of the reactant stream, the radiation source being oriented to direct radiation through the main chamber along the elongated direction of the reactant to intersect with a reactant stream path from the reactant inlet.

58. The reactor of claim 57 wherein the avenge of the velocities is at least about 1 meter per second.

59. The reactor of clam 57 wherein the velocity along the length of the inlet at each position differs in magnitude from the average velocity by no more than about 35% of the average of the velocities.

60. A reactor comprising a main chamber, a radiation source and a reactant source comprising a reactant inlet that opens into the man chamber, the reactant source comprising an aerosol generator that generates an aerosol for delivery through the reactant inlet, the reactant inlet comprising an elongated dimension relative to an orthogonal dimension thereof and the reactant inlet comprising a plurality of openings separated along the elongated dimension of the inlet with a barrier separating each of the openings from an adjacent opening.

61. The reactor of claim 60 wherein the plurality of openings comprises at least three openings.

62. Th reactor of claim 60 wherein each opening is itself elongated along the elongated dimension of the inlet.

63. The reactor of claim 60 wherein the reactant source comprises a reactant vapor precursor source.