Optically encoded particles
First Claim
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1. An optically encoded particle comprising:
- a first porous layer having a first porosity; and
n additional porous layers at least one of which has a porosity differing from said first porosity;
wherein said first porous layer and said n additional porous layers are configured to produce an interference pattern in the reflectivity spectrum that forms an optical signature.
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Abstract
The invention concerns a particle having a code embedded in its physical structure by refractive index changes between different regions of the particle. In preferred embodiments, a thin film possesses porosity that varies in a manner to produce a code detectable in the reflectivity spectrum.
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Citations
47 Claims
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1. An optically encoded particle comprising:
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a first porous layer having a first porosity; and
n additional porous layers at least one of which has a porosity differing from said first porosity;
whereinsaid first porous layer and said n additional porous layers are configured to produce an interference pattern in the reflectivity spectrum that forms an optical signature. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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- 11. An optically encoded particle comprising a thin film in which porosity varies in a manner to produce a code detectable in the reflectivity spectrum.
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21. A method for encoding thin films, comprising steps of:
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etching a semiconductor or insulator substrate to form a thin film including pores;
varying etching conditions to vary porosity in the thin film according to a pattern that will generate a code in the reflectivity spectrum in response to illumination. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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36. A method of encoding micron sized particles, the method comprising steps of:
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etching a wafer to form a thin film having a varying porosity that will produce a detectable optical signature in response to illumination;
applying an electropolishing current to the wafer to remove the porous film from the wafer;
dicing the film into micron-sized particles, each micron-sized particle maintaining an optical signature produced by said step of etching. - View Dependent Claims (37)
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- 38. An encoded micron-sized particle having a code embedded in its physical structure by refractive index changes between different regions of the particle.
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47. An optically encoded particle comprising a porosity varying in layers to form a structure whose optical reflectivity spectrum can be recognized as a distinct interference pattern for the purposes of distinct identification of said particle.
Specification