Integrated capacitor-like battery and associated method
First Claim
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1. A method of fabricating a photovoltaic device, comprising:
- providing a substrate;
forming an electrode first film on the substrate;
forming a semiconductor second film on the electrode first film;
forming a semiconductor third film on the semiconductor second film; and
forming an electrode fourth film on the semiconductor third, film wherein one of forming the second film and forming the third film includes;
depositing semiconductor material using a deposition source; and
supplying focussed energy to the semiconductor material to deposit the semiconductor material into a highly ordered crystalline film structure.
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Abstract
A method and system for fabricating solid-state energy-storage and energy-conversion devices including fabrication of films for devices without an anneal step, especially for the fabrication of supercapacitors and photovoltaic cells. A film is fabricated by depositing a first material layer to a location. Energy is supplied directly to the material forming the film. The energy can be in the form of energized ions of a second material. Supplying energy directly to the material and/or the film being deposited assists the growth of the crystalline structure of the film and controls stoichiometry.
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Citations
19 Claims
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1. A method of fabricating a photovoltaic device, comprising:
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providing a substrate;
forming an electrode first film on the substrate;
forming a semiconductor second film on the electrode first film;
forming a semiconductor third film on the semiconductor second film; and
forming an electrode fourth film on the semiconductor third, film wherein one of forming the second film and forming the third film includes;
depositing semiconductor material using a deposition source; and
supplying focussed energy to the semiconductor material to deposit the semiconductor material into a highly ordered crystalline film structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A photovoltaic cell made according to a method comprising:
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providing a substrate;
forming a essentially transparent electrode first film on the substrate;
forming a semiconductor second film on the electrode first film;
forming a semiconductor third film on the semiconductor second film; and
forming an electrode fourth film on the semiconductor third, film wherein one of forming the second film and forming the third film includes;
depositing semiconductor material using a deposition source; and
supplying focussed energy to the semiconductor material to deposit the semiconductor material into a highly ordered crystalline film structure. - View Dependent Claims (18)
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19. An apparatus for fabricating a photovoltaic device on a substrate, comprising:
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means for forming an electrode first film on the substrate;
means for forming a high-quality semiconductor second film on the electrode first film;
means for forming a high-quality semiconductor third film on the semiconductor second film; and
means for forming an electrode fourth film on the semiconductor third, film wherein one of the means for forming the second film and the means for forming the third film includes;
means for depositing semiconductor material using a deposition source and for supplying focused energy to the semiconductor material to deposit the semiconductor material into a highly ordered crystalline film structure.
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Specification