Method to improve copper electrochemical deposition
First Claim
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1. A method for reducing or avoiding copper layer pitting in a copper electrochemical deposition process to improve deposition uniformity comprising the steps of:
- providing a substrate for carrying out at least a first copper electroplating process;
providing a copper plating solution comprising a deforming (antiforming) agent wherein the deforming agent comprises at least one alkylene monomer; and
, carrying out at least a first copper electroplating process to deposit at least a first copper layer.
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Abstract
A method for reducing or avoiding copper layer pitting in a copper electrochemical deposition process to improve deposition uniformity including providing a substrate for carrying out at least a first copper electroplating process; providing a copper electroplating solution including a deforming (antiforming) agent wherein the antiforming (deforming) agent includes at least one alkylene monomer; and, carrying out at least a first copper electroplating process to deposit at least a first copper layer.
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Citations
35 Claims
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1. A method for reducing or avoiding copper layer pitting in a copper electrochemical deposition process to improve deposition uniformity comprising the steps of:
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providing a substrate for carrying out at least a first copper electroplating process;
providing a copper plating solution comprising a deforming (antiforming) agent wherein the deforming agent comprises at least one alkylene monomer; and
,carrying out at least a first copper electroplating process to deposit at least a first copper layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A method for improving a copper electroplating process for filling high aspect ratio openings to reduce or avoid pitting defects comprising the steps of:
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providing a semiconductor process wafer comprising a via opening extending through a thickness of at least one dielectric insulating layer including an uppermost copper seed layer lining the via opening;
providing a copper plating solution for carrying out at least a first copper electroplating process over the copper seed layer wherein the copper plating solution includes at least one copper salt, an electrolyte, and at least one deforming (antiforming) agent selected from the group consisting of polyalkylene glycols, polyalkylene glycol ethers, polyalkylene oxide copolymers, and amine base polyalkylene oxide copolymers;
carrying out the at least a first copper electroplating process to blanket deposit a first copper layer to cover the copper seed layer; and
,carrying out at least a second copper electroplating process to blanket deposit at least a second copper layer comprising the addition of additives to the copper plating solution selected from the group consisting of suppressors, brighteners, levelers, and the at least one deforming (antiforming) agent. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27)
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28. A copper electroplating solution for carrying out an electroplating process comprising:
an antiforming (deforming) agent comprising an alkylene containing monomer. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35)
Specification