Method of electrochemically fabricating multilayer structures having improved interlayer adhesion
First Claim
1. A fabrication process for forming a multi-layer three-dimensional structure, comprising:
- (a) forming and adhering a layer of material to a previously formed layer and/or to a substrate, wherein the layer comprises a desired pattern of at least one material; and
(b) repeating the forming and adhering operation of (a) at least twice to build up a three-dimensional structure from a plurality of adhered layers, wherein the desired patterning on at least two layers is different;
(c) after formation of at least a plurality of layers, subjecting the multi-layer structure to a heat treatment;
wherein the structure comprises at least one metal, and wherein formation of the desired pattern for at least one layer comprises use of an adhered mask.
1 Assignment
0 Petitions
Accused Products
Abstract
Multi-layer microscale or mesoscale structures are fabricated with adhered layers (e.g. layers that are bonded together upon deposition of successive layers to previous layers) and are then subjected to a heat treatment operation that enhances the interlayer adhesion significantly. The heat treatment operation is believed to result in diffusion of material across the layer boundaries and associated enhancement in adhesion (i.e. diffusion bonding). Interlayer adhesion and maybe intra-layer cohesion may be enhanced by heat treating in the presence of a reducing atmosphere that may help remove weaker oxides from surfaces or even from internal portions of layers.
-
Citations
72 Claims
-
1. A fabrication process for forming a multi-layer three-dimensional structure, comprising:
-
(a) forming and adhering a layer of material to a previously formed layer and/or to a substrate, wherein the layer comprises a desired pattern of at least one material; and
(b) repeating the forming and adhering operation of (a) at least twice to build up a three-dimensional structure from a plurality of adhered layers, wherein the desired patterning on at least two layers is different;
(c) after formation of at least a plurality of layers, subjecting the multi-layer structure to a heat treatment;
wherein the structure comprises at least one metal, and wherein formation of the desired pattern for at least one layer comprises use of an adhered mask. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 27)
-
-
24. A process for forming a multi-layer three-dimensional structure, comprising:
-
(a) forming a patterned deposit of at least one first material on to a substrate or previously deposited material such that at least one void exists around or within the patterned deposit of the at least first material;
(b) depositing at least one second material into at least a portion of the at least one void;
(c) trimming the deposit of at least on of the at least one first material or the at least one second material to a desired level;
(d) repeating the forming and adhering operations of (a)-(c) a plurality of times to build up a three-dimensional structure from a plurality of adhered layers;
(e) after formation of at least a plurality of layers, subjecting the multi-layer structure to heat treatment, wherein at least one deposited material comprises a metal, and wherein the formaitng of the patterned deposit for at least one layer comprises use of an adhered mask. - View Dependent Claims (25, 26)
-
- 28. The process of 27 wherein the ratio is no greater than about 2.
-
30. A fabrication process for forming a multi-layer three-dimensional structure, comprising:
-
(a) forming and adhering a layer to a previously formed layer and/or to a substrate; and
(b) repeating the forming and adhering operation of (a) at least once to build up a three-dimensional structure from a plurality of adhered layers, wherein at least a plurality of the layers each comprise at least two deposited materials;
(c) after formation of at least a plurality of layers and while at least two materials remain in contact adhered to one another, subjecting the multi-layer structure to a heat treatment;
wherein the structure comprises at least one metal.
-
-
31. A fabrication process for forming a multi-layer three-dimensional structure, comprising:
-
(a) forming and adhering a layer to a previously formed layer and/or to a substrate; and
(b) repeating the forming and adhering operation of (a) at least once to build up a three-dimensional structure from a plurality of adhered layers, wherein the forming of at least a plurality of layers comprises removing at least some deposited material in a planarization operation;
(c) after formation of at least a plurality of layers, subjecting the multi-layer structure to a heat treatment;
wherein the structure comprises at least one metal, and wherein the forming and adhering of at least one layer comprises use of an adhered mask in the selective patterning of at least one material.
-
-
32. A fabrication process for forming a multi-layer three-dimensional structure, comprising:
-
(a) forming and adhering a layer to a previously formed layer and/or to a substrate, wherein the layer comprises a desired pattern of at least one material; and
(b) repeating the forming and adhering operation of (a) at least once to build up a three-dimensional structure from a plurality of adhered layers, wherein the desired patterning of at least one material deposited on a subsequent layer adheres directly to the desired patterning of at least one material deposited on a preceding layer;
(c) after formation of at least a plurality of layers, subjecting the multi-layer structure to a heat treatment;
wherein the structure comprises at least one metal, and wherein the forming and adhering of at least one layer comprises use of an adhered mask in the selective patterning of at least one material.
-
-
33. A fabrication process for forming a multi-layer three-dimensional structure, comprising:
-
(a) forming and adhering a layer to a previously formed layer and/or to a substrate, wherein the layer comprises a desired pattern of at least one material; and
(b) repeating the forming and adhering operation of (a) at least once to build up a three-dimensional structure from a plurality of adhered layers;
(c) after formation of at least a plurality of layers, subjecting the multi-layer structure to a heat treatment, wherein the structure is heated in a manner such that any local temperature variations within the structure do not directly result from localized differences in electrical conductivity of the structural material;
wherein the structure comprises at least one metal, and wherein the forming and adhering of at least one layer comprises use of an adhered mask in the selective patterning of at least one material.
-
-
34. A fabrication process for forming a multi-layer three-dimensional structure, comprising:
-
(a) forming and adhering a layer to a previously formed layer and/or to a substrate, wherein the layer comprises a desired pattern of at least one material; and
(b) repeating the forming and adhering operation of (a) at least once to build up a three-dimensional structure from a plurality of adhered layers;
(c) after formation of at least a plurality of layers, subjecting the multi-layer structure to a heat treatment such that substantially all portions of the structure are heated to a substantially uniform temperature;
wherein the structure comprises at least one metal.
-
-
35. A fabrication process for forming a multi-layer three-dimensional structure, comprising:
-
(a) forming and adhering a layer to a previously formed layer and/or to a substrate, wherein the layer comprises a desired pattern of at least one material; and
(b) repeating the forming and adhering operation of (a) at least once to build up a three-dimensional structure from a plurality of adhered layers;
(c) after formation of at least a plurality of layers, subjecting the multi-layer structure to a heat treatment, wherein a maximum temperature during heat treatment is less than a recrystallization temperature of at least one metal forming part of the structure, and wherein the forming and adhering of at least one layer comprises use of an adhered mask in the selective patterning of at least one material.
-
-
36. A fabrication process for forming a multi-layer three-dimensional structure, comprising:
-
(a) forming and adhering a layer to a previously formed layer and/or to a substrate, wherein the layer comprises a desired pattern of at least one material; and
(b) repeating the forming and adhering operation of (a) at least once to build up a three-dimensional structure from a plurality of adhered layers, wherein at least a plurality of the layers each comprise at least one structural material and at least one sacrificial material;
(c) separating the sacrificial material from the structure to release the structure; and
(d) after formation of at least a plurality of layers but prior to release, subjecting the multi-layer structure to a heat treatment;
wherein the structure comprises at least one metal, and wherein the forming and adhering of at least one layer comprises use of an adhered mask in the selective patterning of at least one material.
-
-
37. A fabrication process for forming a multi-layer three-dimensional structure, comprising:
-
(a) forming and adhering a layer to a previously formed layer and/or to a substrate, wherein the layer comprises a desired pattern of at least one material; and
(b) repeating the forming and adhering operation of (a) at least once to build up a three-dimensional structure from a plurality of adhered layers, wherein at least a plurality of the layers each comprise at least one structural material and at least one sacrificial material, and wherein the desired patterning on at least two layers is different;
(c) separating the sacrificial material from the structure to release the structure; and
(d) after release, subjecting the multi-layer structure to a heat treatment;
wherein the structure comprises at least one metal, and wherein the forming and adhering of at least one layer comprises use of an adhered mask in the selective patterning of at least one material.
-
-
38. A fabrication process for forming a multi-layer three-dimensional structure, comprising:
-
(a) forming and adhering a layer to a previously formed layer and/or to a substrate, wherein the layer comprises a desired pattern of at least one material; and
(b) repeating the forming and adhering operation of (a) at least once to build up a three-dimensional structure from a plurality of adhered layers;
(c) subjecting the multi-layer structure to a heat treatment while the structure is located in a selected atmosphere comprising an inert gas, wherein the structure comprises at least one metal.
-
-
39. A fabrication process for forming a multi-layer three-dimensional structure, comprising:
-
(a) forming and adhering a layer to a previously formed layer and/or to a substrate, wherein the layer comprises a desired pattern of at least one material; and
(b) repeating the forming and adhering operation of (a) at least once to build up a three-dimensional structure from a plurality of adhered layers;
(c) subjecting the multi-layer structure to a heat treatment while the structure is located in a selected atmosphere comprising a reducing gas, wherein the structure comprises at least one metal.
-
-
40. A fabrication process for forming a multi-layer three-dimensional structure, comprising:
-
(a) forming and adhering a layer to a previously formed layer and/or to a substrate, wherein the layer comprises a desired pattern of at least one material; and
(b) repeating the forming and adhering operation of (a) at least once to build up a three-dimensional structure from a plurality of adhered layers, wherein at least a plurality of the layers each comprise at least one structural material and at least one sacrificial material, and wherein the desired patterning on at least two layers is different;
(c) separating the sacrificial material from the structure to release the structure;
(d) after release, subjecting the multi-layer structure to a heat treatment;
(e) after the heat treatment, applying a second sacrificial material to the structure. wherein the structure comprises at least one metal. - View Dependent Claims (41, 42, 43)
-
-
44. A fabrication process for forming a multi-layer three-dimensional structure, comprising:
-
(a) forming and adhering a layer of material to a previously formed layer and/or to a substrate, wherein the layer comprises a desired pattern of at least one material; and
(b) repeating the forming and adhering operation of (a) at least twice to build up a three-dimensional structure from a plurality of adhered layers;
(c) after formation of at least a plurality of layers, subjecting the multi-layer structure to a heat treatment; and
(d) releasing the structure from the substrate, wherein the structure comprises at least one metal, and wherein the forming and adhering of at least one layer comprises use of an adhered mask in the selective patterning of at least one material. - View Dependent Claims (45, 46)
-
-
47. A fabrication process for forming a multiple multi-layer three-dimensional structures, comprising:
-
(a) forming and adhering a layer of material to a previously formed layer and/or to a substrate, wherein the layer comprises a desired pattern of at least one material; and
(b) repeating the forming and adhering operation of (a) at least twice to build up a plurality of three-dimensional structures from a plurality of adhered layers;
(c) after formation of at least a plurality of layers, subjecting the multi-layer structure to a heat treatment; and
(d) dicing the plurality of structures from one another, wherein the structure comprises at least one metal. - View Dependent Claims (48, 49, 50)
-
-
51. A fabrication process for forming a multi-layer three-dimensional structure, comprising:
-
(a) forming and adhering a layer to a previously formed layer and/or to a substrate, wherein the layer comprises a desired pattern of at least one material; and
(b) repeating the forming and adhering operation of (a) at least once to build up a three-dimensional structure from a plurality of adhered layers;
(c) after formation of at least a plurality of layers, subjecting the multi-layer structure to a heat treatment, wherein a maximum effective temperature during heat treatment is less than a recrystallization temperature of at least one metal forming part of the structure, and wherein the heat treatment is applied for a sufficient time and at a sufficient temperature and in an environment that allows interlayer adhesion to be enhanced a substantial amount, and wherein the forming and adhering of at least one layer comprises use of an adhered mask in the selective patterning of at least one material. - View Dependent Claims (52, 53, 54, 55, 56)
-
-
57. A fabrication process for forming a multi-layer three-dimensional structure, comprising:
-
(a) forming and adhering a layer to a previously formed layer and/or to a substrate, wherein the layer comprises a desired pattern of at least one material; and
(b) repeating the forming and adhering operation of (a) at least once to build up a three-dimensional structure from a plurality of adhered layers;
(c) after formation of at least a plurality of layers, subjecting the multi-layer structure to a heat treatment, wherein the heat treatment is applied to the structure for a temperature, a time, and in an environment such that a substantial increase in interlayer adhesion results without significantly reducing the yield strength of the intra-layer material, and wherein the forming and adhering of at least one layer comprises use of an adhered mask in the selective patterning of at least one material. - View Dependent Claims (58, 59, 60, 61, 62)
-
-
63. A fabrication process for forming a multi-layer three-dimensional structure, comprising:
-
(a) forming and adhering a layer to a previously formed layer and/or to a substrate, wherein the layer comprises a desired pattern of at least one material; and
(b) repeating the forming and adhering operation of (a) at least once to build up a three-dimensional structure from a plurality of adhered layers;
(c) after formation of at least a plurality of layers, subjecting the multi-layer structure to a heat treatment, wherein the heat treatment results in the formation of a structure which behaves monolithically up to at least 50% of the yield strength of the intra-layer material, and wherein the forming and adhering of at least one layer comprises use of an adhered mask in the selective patterning of at least one material. - View Dependent Claims (64, 65, 66, 67, 68, 69)
-
-
70. A fabrication process for forming a multi-layer three-dimensional structure, comprising:
-
(a) forming and adhering a layer to a previously formed layer and/or to a substrate, wherein the layer comprises a desired pattern of at least one material; and
(b) repeating the forming and adhering operation of (a) at least once to build up a three-dimensional structure from a plurality of adhered layers;
(c) after formation of at least a plurality of layers, subjecting the multi-layer structure to a heat treatment, wherein the heat treatment results in the formation of a structure which is no more likely to experience interlayer adhesion failure than intra-layer cohesion failure when applied stress is at least 50% of the yield strength of the intra-layer material. - View Dependent Claims (71, 72)
-
Specification