Integrated circuit with a MOS capacitor
First Claim
1. An integrated circuit comprising:
- a substrate having a plurality of isolation islands, wherein at least one isolation island has a semiconductor device formed therein;
a layer of oxide formed and patterned on a surface of the substrate;
a layer of dielectric formed overlaying the layer of oxide and exposed surface areas of the substrate, the layer of dielectric having a dielectric constant that is higher than the dielectric constant of the layer of oxide, wherein the dielectric layer is used as an implant screen in implanting dopants into respective isolation islands to form devices regions; and
at least one capacitor formed in one of the isolated island in the substrate, each capacitor using the layer of dielectric as a capacitor dielectric, each capacitor dielectric is positioned between a top plate and a bottom plate of an associated capacitor.
1 Assignment
0 Petitions
Accused Products
Abstract
The present invention relates to an integrated circuit having a MOS capacitor. In one embodiment, a method of forming an integrated circuit comprises forming an oxide layer on a surface of a substrate, the substrate having a plurality of isolation islands. Each isolation island is used in forming a semiconductor device. Patterning the oxide layer to expose predetermined areas of the surface of the substrate. Depositing a nitride layer overlaying the oxide layer and the exposed surface areas of the substrate. Implanting ions through the nitride layer, wherein the nitride layer is an implant screen for the implanted ions. Using the nitride layer as a capacitor dielectric in forming a capacitor. In addition, performing a dry etch to form contact openings that extend through the layer of nitride and through the layer of oxide to access selected device regions formed in the substrate.
9 Citations
18 Claims
-
1. An integrated circuit comprising:
-
a substrate having a plurality of isolation islands, wherein at least one isolation island has a semiconductor device formed therein;
a layer of oxide formed and patterned on a surface of the substrate;
a layer of dielectric formed overlaying the layer of oxide and exposed surface areas of the substrate, the layer of dielectric having a dielectric constant that is higher than the dielectric constant of the layer of oxide, wherein the dielectric layer is used as an implant screen in implanting dopants into respective isolation islands to form devices regions; and
at least one capacitor formed in one of the isolated island in the substrate, each capacitor using the layer of dielectric as a capacitor dielectric, each capacitor dielectric is positioned between a top plate and a bottom plate of an associated capacitor. - View Dependent Claims (2, 3, 4, 5)
-
-
6. An integrated circuit comprising:
-
a substrate of having a plurality of isolation islands, wherein at least one isolation island has a semiconductor device formed therein;
a layer of oxide formed and patterned on a surface of the substrate;
a layer of dielectric formed overlaying the layer of oxide and exposed surface areas of the substrate, wherein the layer of dielectric has a dielectric constant that is higher than the dielectric constant of the layer of oxide;
the layer of dielectric and the layer of oxide having anisotropic device openings to expose device regions in the substrate, wherein the device openings are formed by a dry etch; and
at least one capacitor formed in one of the isolated islands in the substrate, each capacitor using the layer of dielectric as a capacitor dielectric, each capacitor dielectric is positioned between a top plate and a bottom plate of an associated capacitor. - View Dependent Claims (7, 8, 9, 10)
-
-
11. An integrated circuit comprising:
-
a substrate having a surface and a plurality of isolation islands;
one or more semiconductor devices, each semiconductor device is formed in an associated isolation island, some of the semiconductor devices having device regions formed adjacent the surface of the substrate;
an oxide layer formed and patterned on the surface of the substrate;
a dielectric layer overlaying the patterned oxide layer and exposed surface areas of the substrate, wherein the layer of dielectric has a dielectric constant that is higher than the dielectric constant of the layer of oxide;
the oxide and dielectric layers over select device regions having contact openings with generally vertical side walls with respect to the surface of the substrate; and
at least one capacitor formed in one of the isolation islands, the capacitor having a capacitor dielectric that is formed from a portion of the dielectric layer. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
-
Specification