Calibration device for the calibration of a tester channel of a tester device and a test system

• US 20050046436A1
• Filed: 07/20/2004
• Published: 03/03/2005
• Est. Priority Date: 07/21/2003
• Status: Active Grant

• Current Assignee: Polaris Innovations Limited (Wi-LAN Inc.)
• Original Assignee: Qimonda AG (Infineon Technologies AG)
• Inventors: Brosamlen, Gerd, Bucksch, Thorsten, Frankowsky, Gerd
• Granted Patent: US 7,061,260 B2
• Time in Patent Office: Days
• US Class Current: 324/750.20
• CPC Class Codes: G01R 31/31905 Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture
• CPC Class Codes: G01R 31/3191 Calibration

Abstract

One embodiment of the invention provides a calibration device for the calibration of a tester channel of a tester device to which integrated components on a substrate wafer can be contact-connected for testing with electrical signals. The calibration device includes a connecting device and a planar contact carrier with a first contact area and a second contact area insulated from the first contact area, which can be electrically connected via the connecting device, the connecting device being suitable for connecting the first and second contact areas to the tester device, the first contact area being generally surrounded by the second contact area, so that, when a needle card connected to the tester device is placed onto the contact carrier of the calibration device, one of the contact-connecting needles of the needle card which is connected to the tester channel to be calibrated is placed onto the first contact area and a plurality or all of the further contact-connecting needles of the needle card at tester channels that are not to be calibrated are placed onto the second contact area.

Claims

1. A calibration device for calibrating a tester channel of a tester device, comprising:

a contact carrier comprising a first contact area and a second contact area insulated from the first contact area, wherein the first contact area is connectable to the tester channel being calibrated and the second contact area is connectable to one or more remaining tester channels of the tester device; and

a connecting device for electrically connecting the first and second contact areas through a calibration line to the tester device.

2. The calibration device of claim 1, wherein the first contact area is contact-connectable to one of a plurality of contact-connecting needles of a needle card connected to the tester channel to be calibrated and the second contact area is contact-connectable to one or more remaining contact-connecting needles of the needle card which are connected to the one or more remaining tester channels.

3. The calibration device of claim 2, wherein the contact carrier further comprises a planar substrate having a first conductive shielding layer disposed thereon and a first insulation layer disposed on the first conductive shielding layer, wherein the first and second contact areas are disposed on the insulation layer.

4. The calibration device of claim 3, wherein the second contact areas are electrically connected to the first conductive shielding layer through a plurality of passages through the first insulation layer.

5. The calibration device of claim 2, wherein the first contact area is surrounded by the second contact area.

6. The calibration device of claim 5, wherein the contact carrier further comprises:

a planar substrate having a conductive shielding layer disposed thereon;

a first insulation layer disposed on the conductive shielding layer;

a connection layer disposed on the first insulation layer, the connection layer comprising a first contact-connection area, a second contact-connection area and a conductor track connecting the first contact-connection area to the connecting device; and

a second insulation layer disposed on the connection layer, wherein the first and second contact areas are disposed on the second insulation layer, wherein the first contact-connection area and the second contact-connection area are respectively connected to the first and second contact areas through a plurality of passages in the second insulation layer.

7. The calibration device of claim 2, further comprising a third contact area which is insulated from the first and second contact areas, disposed on the contact carrier adjacent to the first contact area such that an adjacent tester channel to the tester channel to be calibrated is connected to the third contact area when the needle card is placed onto the contact carrier.

8. The calibration device of claim 1, wherein the connecting device comprises a coaxial connection having an inner connection and an outer connection surrounding the inner connection, the inner connection and the outer connection each respectively connected to one of the first contact area and the second contact area.

9. The calibration device of claim 8, wherein the connecting device is disposed laterally with respect to the contact carrier and is connected to the first contact area via a conductor track on the contact carrier.

10. A tester system, comprising:

a tester device having a plurality of tester channels, wherein each tester channel comprises a first transmission line and a second transmission line for signal transmissions in opposite directions;

a needle card for contact-connecting to integrated circuits on a wafer, the needle card having a plurality of contact-connecting needles respectively connected to the plurality of tester channels; and

a calibration device, comprising;

a contact carrier comprising a first contact area and a second contact area insulated from the first contact area, wherein the first contact area is connectable to the contact-connecting needle of the needle card connected to the first and second transmission lines of the tester channel being calibrated and wherein the second contact area is connectable to one or more remaining contact-connecting needles of the needle card which are connected to the one or more remaining tester channels; and

a connecting device for electrically connecting the first and second contact areas through a calibration line to the tester device.

11. The tester system of claim 10, wherein the contact carrier further comprises a planar substrate having a first conductive shielding layer disposed thereon and a first insulation layer disposed on the first conductive shielding layer, wherein the first and second contact areas are disposed on the insulation layer.

12. The tester system of claim 11, wherein the second contact areas are electrically connected to the first conductive shielding layer through a plurality of passages through the first insulation layer.

13. The tester system of claim 11, wherein the first contact area is surrounded by the second contact area.

14. The tester system of claim 13, wherein the contact carrier further comprises:

a planar substrate having a conductive shielding layer disposed thereon;

a first insulation layer disposed on the conductive shielding layer;

a connection layer disposed on the first insulation layer, the connection layer comprising a first contact-connection area, a second contact-connection area and a conductor track connecting the first contact-connection area to the connecting device; and

a second insulation layer disposed on the connection layer, wherein the first and second contact areas are disposed on the second insulation layer, wherein the first contact-connection area and the second contact-connection area are respectively connected to the first and second contact areas through a plurality of passages in the second insulation layer.

15. The tester system of claim 11, further comprising a third contact area which is insulated from the first and second contact areas, disposed on the contact carrier adjacent to the first contact area such that an adjacent tester channel to the tester channel to be calibrated is connected to the third contact area when the needle card is placed onto the contact carrier.

16. The tester system of claim 11, wherein the tester device further comprises a test pattern generator, a test evaluation unit, and a plurality of signal amplifiers and delay elements correspondingly provided for the plurality of tester channels.

17. The tester system of claim 11, further comprising:

a carrier for selectively placing the calibration device in contact with needle card in the tester system.

18. A method for calibrating a tester channel of a tester system, comprising:

connecting a calibration device to a needle card of the tester system, wherein the calibration device comprises a contact carrier comprising a first contact area and a second contact area insulated from the first contact area and a connecting device electrically connecting the first and second contact areas through a calibration line to the tester device and wherein the first contact area is connected to a contact-connecting needle of the needle card connected to a forward transmission line and a return transmission line of the tester channel being calibrated and wherein the second contact area is connected to one or more remaining contact-connecting needles of the needle card which are connected to the one or more remaining tester channels;

transmitting a test signal through the forward transmission line of the tester channel connected to the first contact area;

receiving the test signal through the calibration line by the tester device;

measuring a test signal propagation time and a test signal attenuation of the received test signal; and

determining and setting a signal delay of the tester channel in accordance with the test signal propagation time and a signal gain of the tester channel in accordance with the test signal attenuation.

19. The method of claim 18, wherein a fixed potential is applied to the second contact area.

20. The method of claim 18, further comprising:

connecting one or more adjacent tester channels to one or more third contact areas on the contact carrier which are insulated from the first and second contact areas; and

providing another signal through the adjacent tester channels during calibration of the tester channel.