Method of detecting a fault condition in a micro-electromechanical device
First Claim
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1. A method of detecting a fault condition in a micro-electromechanical device, the method comprising the steps of:
- applying at least one current pulse to an actuator of the device such that the actuator is cyclically displaced at least once;
determining an extent of displacement of the actuator;
calibrating the device by determining a relationship between an operational parameter and said displacement; and
testing the device by applying said parameter to the device, such that an error is detectable where said relationship is not achieved.
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Abstract
A method of detecting a fault condition in a micro-electromechanical device includes the step of applying at least one current pulse to an actuator of the device such that the actuator is cyclically displaced at least once. The extent of displacement of the actuator is determined. The device is calibrated by determining a relationship between an operational parameter and said displacement. The device is tested by applying said parameter to the device, such that an error is detectable where said relationship is not achieved.
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6 Claims
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1. A method of detecting a fault condition in a micro-electromechanical device, the method comprising the steps of:
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applying at least one current pulse to an actuator of the device such that the actuator is cyclically displaced at least once;
determining an extent of displacement of the actuator;
calibrating the device by determining a relationship between an operational parameter and said displacement; and
testing the device by applying said parameter to the device, such that an error is detectable where said relationship is not achieved. - View Dependent Claims (2, 3, 4, 5, 6)
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