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Method of detecting a fault condition in a micro-electromechanical device

  • US 20050046659A1
  • Filed: 09/27/2004
  • Published: 03/03/2005
  • Est. Priority Date: 06/30/1999
  • Status: Active Grant
First Claim
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1. A method of detecting a fault condition in a micro-electromechanical device, the method comprising the steps of:

  • applying at least one current pulse to an actuator of the device such that the actuator is cyclically displaced at least once;

    determining an extent of displacement of the actuator;

    calibrating the device by determining a relationship between an operational parameter and said displacement; and

    testing the device by applying said parameter to the device, such that an error is detectable where said relationship is not achieved.

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