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METHOD OF DEFECT ROOT CAUSE ANALYSIS

  • US 20050049836A1
  • Filed: 04/02/2004
  • Published: 03/03/2005
  • Est. Priority Date: 09/03/2003
  • Status: Abandoned Application
First Claim
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1. A method of defect root cause analysis comprising following steps:

  • providing a sample which comprises a plurality of defects;

    performing a defect inspection to detect sizes and locations of the plurality of defects;

    performing a chemical state analysis of the sample;

    performing a mapping analysis according to a result of the chemical state analysis; and

    analyzing the root cause of the defects according to a result of the mapping analysis.

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