Automatic focusing apparatus

• US 20050052634A1
• Filed: 07/23/2004
• Published: 03/10/2005
• Est. Priority Date: 07/25/2003
• Status: Active Grant

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Ogawa, Riki, Sugihara, Shinji, Tojo, Toru
• Granted Patent: US 7,123,345 B2
• Time in Patent Office: Days
• US Class Current: 355/55
• CPC Class Codes: G03F 7/70725 control
• CPC Class Codes: G03F 9/7003 Alignment type or strategy, e.g. leveling, global alignment
• CPC Class Codes: G03F 9/7026 Focusing
• CPC Class Codes: G03F 9/7034 Leveling
• CPC Class Codes: G03F 9/7088 Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection

Abstract

An automatic focusing apparatus comprises a stage holding a substrate, an objective lens disposed facing the substrate surface, an illumination optics illuminating the substrate surface with a spotted light beam from an oblique direction, a photodetector detecting reflected light from the substrate surface, a position detection circuit detecting a vertical position of the substrate surface from an electric signal obtained from the photodetector to output a position signal, a correction circuit monitoring the position signal in real time and subtracting a surplus exceeding a signal change corresponding to a surface shape change of the substrate from the position signal, when a change amount per unit time of the position signal exceeds a predetermined level and outputting a corrected position signal, and a stage control circuit controlling the vertical position of the stage based on the corrected position signal.

Claims

1. An automatic focusing apparatus comprising:

a stage which holds a substrate and which is movable in a horizontal direction and a vertical direction;

an objective lens disposed facing a surface of the substrate;

a first illumination optics which illuminates the surface of the substrate with at least one spotted light beam from an oblique direction;

a first photodetector which detects reflected light from the surface of the substrate to output a first electrical signal;

a first position detection circuit which detects a vertical position of the surface of the substrate from the first electric signal to output a first position detection signal;

a correction circuit which monitors the first position detection signal in real time and which subtracts a surplus exceeding a signal change corresponding to a surface shape change of the substrate from the first position detection signal, when a change amount per unit time of the first position detection signal exceeds a first predetermined level, to output a corrected position signal; and

a stage control circuit which controls the vertical position of the stage based on the corrected position signal.

2. The automatic focusing apparatus according to claim 1, wherein the first photodetector is either a line sensor or a quadrature photodiode.

3. The automatic focusing apparatus according to claim 1, further comprising a second photodetector which detects a polarization component of a predetermined direction of the reflected light,

wherein the first position detection circuit detects the vertical position of the surface of the substrate from the electric signal obtained by the first photodetector, and

the correction circuit monitors the position detection signal in real time and outputs the corrected position signal, when the change amount per unit time of the first position detection signal with movement of the stage in the horizontal direction exceeds the first predetermined level and when intensity of the electric signal obtained by the second photodetector exceeds a second predetermined level.

4. The automatic focusing apparatus according to claim 1, further comprising:

a second illumination optics which illuminates a back surface of the substrate with spotted light from an oblique direction;

a second photodetector which detects reflected light from the back surface of the substrate to output a second electric signal; and

a second position detection circuit which detects the vertical position of the back surface of the substrate from the second electric signal,

wherein the correction circuit monitors the first position detection signal and the second position detection signal, and outputs the corrected position signal, when the change amount per unit time of the first position detection signal with movement of the stage in the horizontal direction exceeds the first predetermined level and when a difference between the first and the second position detection signal exceed the third predetermined level.

5. The automatic focusing apparatus according to claim 4, wherein the first and the second photodetector are either line sensors or quadrature photodiodes.

6. The automatic focusing apparatus according to claim 1, further comprising:

a first wave plate which is disposed in the first illumination optics to obtain circular polarization of the light beam incident upon the surface of the substrate from the oblique direction;

a second wave plate which obtains linear polarization of the reflected light beam from the surface of the substrate;

a polarizing beam splitter which branches the reflected light beam obtained through the second wave plate into a component along a linear polarization direction of the reflected light and a component crossing the linear polarization direction at a right angle; and

a second photodetector which detects light of the component crossing the linear polarization direction of the reflected light at the right angle, to output a second electric signal,

wherein the first photodetector detects the light of the component along the linear polarization direction of the reflected light, and

the correction circuit monitors the first position detection signal in real time, and outputs the corrected position signal, when the change amount per unit time of the first position detection signal with movement of the stage in the horizontal direction exceeds the first predetermined level and when the second electric signal exceeds a predetermined value.

7. The automatic focusing apparatus according to claim 6, wherein the first and the second wave plate include a λ

/2 plate and a λ

/4 plate.

8. The automatic focusing apparatus according to claim 4, wherein the first photodetector is either a line sensor or a quadrature photodiode.

9. The automatic focusing apparatus according to claim 1, wherein the first illumination optics includes a laser light source.

15. The automatic focusing apparatus according to claim 4, wherein the first to the fourth photodetector are either line sensors or quadrature photodiodes.

10. An automatic focusing apparatus comprising:

a stage which holds a substrate and which is movable in a horizontal direction and a vertical direction;

an objective lens disposed facing the surface of the substrate;

an illumination optics which illuminates the surface of the substrate with a plurality of spotted light beams from an oblique direction at different incident angles or in different incident directions;

a plurality of photodetectors which detect a plurality of reflected lights from the surface of the substrate to output electric signals;

a position detection circuit which selects an electric signal having a minimum signal change amount from the electric signals to detect a vertical position of the surface of the substrate to output a position signal; and

a stage control circuit which controls the vertical position of the stage based on the position signal.

11. The automatic focusing apparatus according to claim 10, further comprising a beam splitter which creates the plurality of spotted light beams at different incident angles.

12. The automatic focusing apparatus according to claim 10, wherein the plurality of photodetectors are either line sensors or quadrature photodiodes.

13. The automatic focusing apparatus according to claim 10, wherein the illumination optics includes a laser light source.

14. An automatic focusing apparatus comprising:

a stage which holds a substrate and which is movable in a horizontal direction and a vertical direction;

an objective lens disposed facing the surface of the substrate;

an illumination optics which illuminates the surface of the substrate with a spotted light beam from an oblique direction;

a wave plate which is disposed in the illumination optics to obtain a circular polarization of the light beam incident upon the surface of the substrate from the oblique direction;

a beam splitter which branches the reflected light from the surface of the substrate into two reflected beams in two directions;

a first polarizing beam splitter which branches one of the two reflected beams into a first and a second light beam whose polarization directions cross each other at a right angle;

a second polarizing beam splitter which branches the other of the two reflected beams into a third and a fourth light beam whose polarization directions cross each other at the right angle and whose polarization directions are different from those of the first and the second light beam by 45 degrees;

a first photodetector which detects the first light beam to output a first electric signal;

a second photodetector which detects the second light beam to output a second electric signal;

a third photodetector which detects the third light beam to output a third electric signal;

a fourth photodetector which detects the fourth light beam to output a fourth electric signal;

a position detection circuit which receives the first to the fourth electric signal and which selects an electric signal having a minimum change amount to detect a vertical position of the surface of the substrate and output a position signal; and

a stage control circuit which controls the vertical position of the stage based on the position signal.

16. The automatic focusing apparatus according to claim 14, wherein the illumination optics includes a laser light source.

17. An automatic focusing apparatus comprising:

a stage which holds a substrate and which is movable in a horizontal direction and a vertical direction;

an objective lens disposed facing the surface of the substrate;

an illumination optics which faces the substrate via the objective lens;

a first beam splitter which transmits a light beam emitted from the illumination optics to irradiate the surface of the substrate with a spotted light beam and receives a reflected light beam from the substrate to emit the reflected light beam out by reflection;

a condensing optics which converges the reflected light beam emitted from the first beam splitter to output a converged beam;

a second beam splitter which branches the converged beam into a first and a second branched light in two directions;

a first area sensor which is disposed on a light path of the first branched light and before a focal position of the condensing optics to detect the first branched light and output a first electric signal;

a second area sensor which is disposed on a light path of the second branched light and behind the focal position of the condensing optics to detect the second branched light and output a second electric signal;

a position detection circuit which processes the first and the second electric signal to detect a vertical position of the substrate and output a position signal; and

a stage control circuit which controls the vertical position of the stage based on the position signal.

18. The automatic focusing apparatus according to claim 17, wherein the position detection circuit compares ellipticity of a beam shape obtained by the first area sensor with that by the second area sensor to detect the vertical position based on a major diameter of the beam shape having a larger ellipticity.

19. The automatic focusing apparatus according to claim 17, wherein the first and the second area sensor are CCD sensors.

20. The automatic focusing apparatus according to claim 17, wherein the illumination optics includes a laser light source.