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Micropump check valve device and method of manufacturing the same

  • US 20050053504A1
  • Filed: 08/31/2004
  • Published: 03/10/2005
  • Est. Priority Date: 09/05/2003
  • Status: Active Grant
First Claim
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1. A micropump check valve device provided in a flow path through which a fluid is passed from an upstream side to a downstream side through pressure change in a micropump, the micropump check valve device comprising:

  • an upstream side member having formed therein a small-bore hole through which the fluid is passed;

    a downstream side member having formed therein a large-bore hole through which the fluid is passed; and

    a valve member having a valve mechanism formed therein and sandwiched between the upstream side member and the downstream side member, wherein the valve mechanism of the valve member is composed of a passing hole formed in correspondence to a position and a size of the large-bore hole in the downstream side member, a contacting part for closing the small-bore hole in the upstream side member, the contacting part being formed inside the passing hole in such a manner as to correspond to the position and size of the small-bore hole in the upstream side member, and supporting parts for supporting the contacting part, the supporting parts being formed in such a manner as to bridge across the passing hole, and wherein the valve member has a greater linear expansion coefficient than the upstream side member and the downstream side member.

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