Method, program product and apparatus for generating assist features utilizing an image field map
First Claim
1. A method of generating assist features for a pattern to be formed on a surface of a substrate, the steps comprising:
- (a) generating an image field map corresponding to the pattern;
(b) extracting characteristics of a contour at a predetermined threshold of the image field map; and
(c) generating at least one assist feature for the pattern in accordance with the characteristics extracted in step (b).
2 Assignments
0 Petitions
Accused Products
Abstract
Disclosed concepts include a method, program product and apparatus for generating assist features for a pattern to be formed on the surface of a substrate by generating an image field map corresponding to the pattern. Characteristics are extracted from the image field map, and assist features are generated for the pattern in accordance with the characteristics extracted in step. The assist features may be oriented relative to a dominant axis of a contour of the image field map. Also, the assist features may be polygon-shaped and sized to surround the contour or relative to the inside of the contour. Moreover, the assist features may be placed in accordance with extrema identified from the image field map. Utilizing the image field map, a conventional and complex two-dimensional rules-based approach for generating assist feature can be obviated.
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Citations
59 Claims
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1. A method of generating assist features for a pattern to be formed on a surface of a substrate, the steps comprising:
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(a) generating an image field map corresponding to the pattern;
(b) extracting characteristics of a contour at a predetermined threshold of the image field map; and
(c) generating at least one assist feature for the pattern in accordance with the characteristics extracted in step (b). - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of generating assist features for a pattern to be formed on a surface of a substrate, the steps comprising:
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(a) generating an image field map corresponding to the pattern;
(b) extracting characteristics of a contour at a predetermined threshold of the image field map;
(c) generating at least one polygon-shaped assist feature for the pattern in accordance with the characteristics extracted in step (b); and
(d) sizing the polygon-shaped assist feature relative to a shape of the contour. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19)
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20. A method of generating assist features for a pattern to be formed on a surface of a substrate, the steps comprising:
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(a) generating an image field map corresponding to the pattern;
(b) identifying an extrema or local extrema of the image field map;
(c) determining an axial direction of least curvature from the extrema or local extrema; and
(d) orienting an assist feature relative to the axial direction. - View Dependent Claims (21, 22, 23, 24)
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25. A computer program product, comprising executable code transportable by at least one machine readable medium, wherein execution of the code by at least one programmable computer causes the at least one programmable computer to perform a sequence of steps for generating assist features for a pattern to be formed on a surface of a substrate, the steps comprising:
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(a) generating an image field map corresponding to the pattern;
(b) extracting characteristics of a contour at a predetermined threshold of the image field map; and
(c) generating at least one assist feature for the pattern in accordance with the characteristics extracted in step (b). - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33, 34)
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35. A computer program product, comprising executable code transportable by at least one machine readable medium, wherein execution of the code by at least one programmable computer causes the at least one programmable computer to perform a sequence of steps for generating assist features for a pattern to be formed on a surface of a substrate, the steps comprising:
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(a) generating an image field map corresponding to the pattern;
(b) extracting characteristics of a contour at a predetermined threshold of the image field map;
(c) generating at least one polygon-shaped assist feature for the pattern in accordance with the characteristics extracted in step (b); and
(d) sizing the polygon-shaped assist feature relative to a shape of the contour. - View Dependent Claims (36, 37, 38, 39, 40, 41, 42, 43)
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44. A computer program product, comprising executable code transportable by at least one machine readable medium, wherein execution of the code by at least one programmable computer causes the at least one programmable computer to perform a sequence of steps for generating assist features for a pattern to be formed on a surface of a substrate, the steps comprising:
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(a) generating an image field map corresponding to the pattern;
(b) identifying an extrema or local extrema of the image field map;
(c) determining an axial direction of least curvature from the extrema or local extrema; and
(d) orienting an assist feature relative to the axial direction. - View Dependent Claims (45, 46, 47, 48, 49)
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50. An apparatus for imaging a pattern on a surface of a substrate utilizing a mask, said apparatus comprising:
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a radiation system for supplying a projection beam of radiation;
an illuminator for receiving the projection beam of radiation and projecting an adjusted beam of radiation a portion of the mask, and a projection system for imaging a corresponding irradiated portion of the mask, onto a target portion of a substrate, wherein the mask is formed utilizing assist features generated in accordance with a non-rules based two-dimensional analysis of an image field map corresponding to the pattern. - View Dependent Claims (51, 52, 53, 54, 55, 56, 57, 58, 59)
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Specification