Further method to pattern a substrate

• US 20050053850A1
• Filed: 08/04/2004
• Published: 03/10/2005
• Est. Priority Date: 08/04/2003
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: Micronic Laser Systems AB (Mycronic AB)
• Inventors: Eklund, Robert, Askebjer, Per, Walford, Jonathan, Fosshaug, Hans
• Granted Patent: US 7,150,949 B2
• Time in Patent Office: Days
• US Class Current: 430/5
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
• CPC Class Codes: G03F 7/70558 Dose control, i.e. achievement of a desired dose

Abstract

The present invention relates to methods for patterning substrates, such as reticles, masks or wafers, which reduce critical dimension variations, improving CD uniformity. In particular, it relates to tuning doses applied in passes of a multipass writing strategy to measurable characteristics of resists or radiation sensitive layers applied to the substrates. Particular writing strategies are described. Aspects of the present invention are described in the claims, specification and drawings.

Claims

1. A method of lithography for enhancing uniformity of critical dimensions of features patterned onto a workpiece coated with a layer sensitive to an energy beam, using the energy beam and a multipass writing strategy, the method including:

determining individual doses for writing passes so that the passes will affect said coating substantially equally, thereby enhancing said uniformity of critical dimensions of features;

exposing said coating using the multipass writing strategy, applying the individual doses in the writing passes; and

developing said coating.

2. The method according to claim 1, further including:

creating said features by a spatial light modulator.

3. The method according to claim 1, wherein said energy beam is a pulsed radiation in the range of EUV-DUV.

4. The method according to claim 1, further including creating said features by a modulator and deflector arrangement capable of deflecting and setting the intensity of said radiation beam.

5. The method according to claim 1, further including creating said features by a diffraction grating.

6. The method according to claim 1, wherein said method includes two exposure passes, of which a first exposure pass has a dose less than half of an exposure threshold and a second exposure pass has a dose greater than half of the exposure threshold.

7. The method according to claim 1, wherein said method includes three exposure passes or more, of which said dose is increased linearly for following passes.

8. The method according to claim 1, wherein said method includes three exposure passes or more, of which said dose is increased exponentially for following passes.

9. The method according to claim 1, wherein said method includes three exposure passes or more, of which said dose is increased logarithmically for following passes.

10. The method according to claim 1, wherein each portion of said workpiece is patterned with a first exposure pass before exposing a next exposure passes.

11. The method according to claim 10, wherein said portions are exposed in the same direction.

12. The method according to claim 10, wherein said portions are exposed in alternating directions.

13. The method according to claim 1, wherein the dose of the last exposure is within the range of 40% to 60% higher than the first exposure.

14. The method according to claim 1, wherein the dose of the last exposure is within the range of 45% to 55% higher than the first exposure.

15. The method according to claim 1, wherein the coating sensitive to electromagnetic radiation is a chemically amplified resist (CAR).

16. The method according to claim 1, wherein said workpiece is a mask substrate.

17. The method according to claim 1, wherein said workpiece is a wafer.

18. The method according to claim 13, wherein four writing passes are used.

19. A method of producing a mask or reticle, according to claim 1, further wherein the workpiece is the mask or reticle, further including patterning the workpiece after developing the coating.

20. A method of producing a layer of a device structure, according to claim 1, further wherein the workpiece is a wafer, further including patterning the workpiece after developing the coating.

21. A method of producing precise structures on a second workpiece according to claim 1, wherein the workpiece of claim 1 is a mask or reticle, further including:

exposing a layer of radiation sensitive material on the second workpiece using the mask or reticle; and

patterning a layer of a device structure on the second workpiece using the exposed layer on the second workpiece.