×

Polishing pad for chemical mechanical polishing

  • US 20050055885A1
  • Filed: 09/14/2004
  • Published: 03/17/2005
  • Est. Priority Date: 09/15/2003
  • Status: Abandoned Application
First Claim
Patent Images

1. A polishing pad for chemical mechanical polishing comprising:

  • a polishing body comprising a thermoplastic foam substrate having a surface comprising concave cells; and

    a polishing agent coating an interior surface of said concave cells, wherein said polishing agent comprises an inorganic metal oxide that includes carbides or nitrides.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×