Object inspection and/or modification system and method

• US 20050056783A1
• Filed: 06/22/2004
• Published: 03/17/2005
• Est. Priority Date: 07/01/1999
• Status: Active Grant

• Current Assignee: Terraspan LLC
• Original Assignee: General Nanotechnology LLC
• Inventors: Kley, Victor B.
• Granted Patent: US 7,109,482 B2
• Time in Patent Office: Days
• US Class Current: 250/309
• CPC Class Codes: G01Q 20/00 Monitoring the movement or position of the probe
• CPC Class Codes: G01Q 20/02 by optical means
• CPC Class Codes: G01Q 60/04 STM [Scanning Tunnelling Microscopy] combined with AFM [Atomic Force Microscopy]
• CPC Class Codes: G01Q 60/06 SNOM [Scanning Near-field Optical Microscopy] combined with AFM [Atomic Force Microscopy]
• CPC Class Codes: G01Q 70/02 Probe holders
• CPC Class Codes: G01Q 70/06 Probe tip arrays
• CPC Class Codes: G01Q 80/00 Applications, other than SPM, of scanning-probe techniques manufacture or treatment of nanostructures B82B3/00; recording or reproducing information using near-field interaction G11B9/12, G11B11/24, G11B13/08

Abstract

A scanning probe microscope system (100) includes an objective lens (147), a clamping circuit (404), a tip deflection measurement circuit (421), a cantilever (136), and a probe (137) for modifying and inspecting an object (102) disposed on a stage (129).

Claims

1. In a scanning probe microscope and/or nanomachining system having scanning probe functionality and non-scanning-probe functionality, the system including a probe and/or tool, the probe and/or tool collectively being referred to as the probe, positioned relative to a sample volume and having relative motion between the probe and the sample volume in the X, Y and Z space and controlled and sensed in desired directions with respect to the sample volume and/or any element thereof, the sample volume and/or any element thereof collectively being referred to as the sample volume, and producing data responsive to the sample volume and/or a property of the sample volume, a method for accurately measuring a parameter of the sample volume or performing a task related to the sample volume, the method including the following steps:

providing a first scan by the probe of the sample volume in X, Y and Z to produce data representative of a true surface of the sample volume, the data representing the true surface including a portion where there are values for at least two Z coordinates corresponding to the same X-Y coordinate pair, and

storing the data representative of the sample volume, and/or data representative of any parametric representation of the sample volume.

2. The method of claim 1 wherein the first scan produces volume data by at least one of an atomic force measurement, a tunneling current measurement, a scanning electron beam probe measurement, and a scanning ion beam probe measurement.

4. The method of claim 1 wherein the first scan produces volume data by a scanning electron beam probe measurement and/or a scanning ion beam probe measurement.

6. The method of claim 4 wherein the first scan simultaneously produces electromagnetic data and the volume data in a case where the volume data is generated by a scanning electron beam probe measurement, or secondary particle data and the volume data in a case where the volume data is generated by a scanning ion beam probe measurement.

8. The method of claim 1, and further comprising providing a second scan that produces volume data by at least one magnetic force measurement, and/or at least one magnetic field measurement, and/or at least one magnetic gradient measurement.

9. The method of claim 1 wherein the first scan produces volume data by an electric field measurement.

10. The method of claim 1, and further comprising providing a second scan that is used to modify the sample volume.

11. The method of claim 10 wherein the modification is accomplished by at least one of (a) the probe mechanically cutting the sample volume, (b) applying an electric field between the probe and the sample volume, and (c) applying a particle beam of ions or electrons between the probe and the sample volume.

50. The method of claim 1, and further comprising:

providing a second operation based on the information previously obtained, and

measuring a portion or all of the volume or any other parameter associated with the target volume or making any change to said volume.

3. (Canceled).

5. (Canceled).

7. (Canceled).

12. (Canceled).

13. (Canceled).

14. In a scanning probe microscope and/or nanomachining system having scanning probe functionality and non-scanning-probe functionality, the system including a probe and/or tool tool, the probe and/or tool collectively being referred to as the probe, positioned relative to a sample volume and/or topography and having relative motion between the probe and the sample volume and/or topography in the X, Y and Z space and controlled and sensed in desired directions with respect to the sample volume and/or topography and/or any element thereof, the sample volume and/or topography and/or any element thereof collectively being referred to as the sample volume and/or topography and producing data responsive to any element or property of said sample volume of and/or topography, a method for accurately measuring a parameter of that sample volume and/or topography or performing a task related to the sample volume and/or topography, the method including the following steps:

providing a first scan by the probe of regions around the sample volume and/or topography in X, Y and Z or any element thereof to produce data representative of the bounding volumetric and/or topographic elements of the sample volume and/or topography,

storing the data representative of the bounding volume and/or topography, any parametric representation, and/or simultaneous parametric representation and/or any element of that volume or topography.

providing a second operation based on the information previously obtained,

measuring a portion or all of the volume or topography or any other parameter associated with the target volume or topography or making any change to said volume or topography.

15. The method of claim 14 wherein the first scan produces volume or topographic data by at least one of an atomic force measurement and a tunneling current measurement.

16. The method of claim 14 wherein the first scan produces volume or topographic data by a scanning electron beam probe measurement or a scanning ion beam probe measurement.

18. The method of claim 16 wherein the first scan simultaneously produces electromagnetic data and the volume and/or topographic data in a case where the volume and/or topographic data is generated by a scanning electron beam probe measurement, or secondary particle data and the sample volume and/or topographic data in a case where the sample volume and/or topographic data is generated by a scanning ion beam probe measurement.

20. The method of claim 14, and further comprising providing a second scan that produces sample volume or topographic data by at least one magnetic force measurement, and/or at least one magnetic field measurement, and/or at least one magnetic gradient measurement.

21. The method of claim 14 wherein the first scan produces sample volume or topographic data by an electric field measurement.

22. The method of claim 14, and further comprising providing a second scan that is used to modify the sample volume and/or topography.

23. The method of claim 22 wherein the modification is accomplished by at least one of (a) the probe mechanically cutting the sample volume, (b) applying an electric field between the probe and the sample volume, and (c) applying a particle beam of ions or electrons between the probe and the sample volume.

14a. a. (Canceled).

17. (Canceled).

19. (Canceled).

24. (Canceled).

25. (Canceled).

26. In a scanning probe microscope and/or nanomachining system having scanning probe functionality and non-scanning-probe functionality, the system including a probe and/or tool, the probe and/or tool collectively being referred to as the probe, positioned relative to a sample volume or topography and having relative motion between the probe and the sample volume and/or topography in the X, Y and Z space and controlled and sensed in desired directions with respect to the sample volume and/or topography and/or any element thereof, the sample volume and/or topography and/or any element thereof collectively being referred to as the sample volume and/or topography, and producing data responsive to any element or property of said sample volume and/or topography, a method for accurately measuring a parameter of the sample volume and/or topography and/or performing a task related to the sample volume and/or topography, the method including the following steps:

providing a first location by the probe of regions around/on or within the sample volume and/or topography in X, Y and Z to locate the volumetric and/or topographic elements of a starting reference point or points the sample volume and/or topography, without storing the data representative of the bounding volume or topography, any parametric representation, and/or simultaneous parametric representation and/or any element of that sample volume or topography,

measuring a portion or all of the sample volume or topography or any other parameter associated with the sample volume or topography and/or making any change to said sample volume or topography.

27. The method of claim 26 wherein the first scan produces volume data by at least one of an atomic force measurement and a tunneling current measurement, a scanning electron beam probe measurement, and a scanning ion beam probe measurement.

29. The method of claim 26 wherein the first scan produces volume data by a scanning electron beam probe measurement or a scanning ion beam probe measurement.

31. The method of claim 29 wherein the first scan simultaneously produces electromagnetic data and the volume and/or topographic data in a case where the volume and/or topographic data is generated by a scanning electron beam probe measurement, or secondary particle data and the sample volume and/or topographic data in a case where the sample volume and/or topographic data is generated by a scanning ion beam probe measurement.

33. The method of claim 26, and further comprising providing a second scan that produces volume data by at least one magnetic force measurement, and/or at least one magnetic field measurement, and/or at least one magnetic gradient measurement.

34. The method of claim 26 wherein the first scan produces volume data by an electric field measurement.

35. The method of claim 26, and further comprising providing a second scan that is used to modify the volume and/or topography.

36. The method of claim 34 wherein the modification is accomplished by at least one of (a) the probe mechanically cutting the volume of the sample, (b) applying an electric field between the probe and the volume of the sample, and (c) applying a particle beam of ions or electrons between the probe and the volume of the sample.

28. (Canceled).

30. (Canceled).

32. (Canceled).

37. (Canceled).

38. (Canceled).

39. An illumination system for an opaque or optically limited or blocked stage in which illumination is introduced along one or more edges of the sample and is arranged so reflecting elements cause the illumination to be propagated across the sample.

40. The illumination system of claim 39 in which the intensity of the illumination introduced into the sample is a function of the position of the stage with respect to the optical observing means.

41. An illumination system for an opaque or optically limited or blocked stage in which illumination is introduced along one or more sides of the sample, striking the sample at a glancing angle just under the optical observing means.

42. The illumination system of claim 41 in which the source means is fixed to always point at the glancing area below a fixed optical observing means.

43. The illumination system of claim 41 in which the source means is moved to always point at the glancing area below a movable optical observing means

44. A nanomachining system as describe herein in which the tip or tool is clamped by mechanical, magnetic, or electrostatic means prior to beginning the nanomachining material modification process.

45. A nanomachining system as described herein in which the tip or tool is stopped from any SPM induced vibration and is moved a known or estimated distance to contact or nearly contact the target volume.

46. A nanomachining system as described herein in which the tip or tool is stopped from any SPM induced vibration and is moved until a measurable change in any related sensing system indicates that the tip of the tool is in contact with the target volume.

47. A nanomachining system as described herein in which the tip or tool is not stopped from any SPM induced vibration but is restricted in its normal motion (associated with measurement) so as to follow the loci of a target nanomachining step to nanomachine a particular feature or features in the target volume.

48. A nanomachining system as described herein in which the tip or tool is not stopped from any SPM induced vibration but is restricted in its normal motion (associated with measurement) so as to follow the loci of a target nanomachining step to nanomachine a particular feature or features in the target volume and the means for monitoring the tip or tool for measurement is used to determine when the tip or tool is no longer cutting the target volume.

49. A nanomachining system as described herein in which the tip or tool is not stopped from any SPM induced vibration but is restricted in its normal motion (associated with measurement) so as to follow the loci of a target nanomachining step to nanomachine a particular feature or features in the target volume and the means for monitoring the tip or tool for measurement is used to determine when the tip or tool is no longer cutting the target volume.

51. In a scanning probe microscope and/or nanomachining system, the system including one or more SPM probes and/or tools, the one or more SPM probes and/or tools collectively being referred to as the probe, positioned relative to a sample and having relative motion between the probe and the sample in the X, Y and Z space and controlled and sensed in desired directions with respect to the sample and/or any element thereof, the sample and/or any element thereof collectively being referred to as the sample, and producing data responsive to the sample and/or a property of the sample, a method for accurately measuring a parameter of the sample or performing a task related to the sample, the method comprising:

performing an inspection of the sample using the probe to produce SPM inspection data representative of a true surface of the sample, the data representing the true surface including a portion where there are values for at least two Z coordinates corresponding to the same X-Y coordinate pair; and

using the inspection data to perform an additional SPM operation on the sample.

52. The method of claim 51 wherein:

the inspection data is geometric data that characterizes the true surface; and

the additional SPM operation is based directly on the geometric data.

53. The method of claim 51 wherein:

the inspection data is parametric data that characterizes values of a parameter; and

the additional SPM operation is based on the parametric data.

54. The method of claim 51, and further comprising generating guide data based on the inspection data, wherein the additional SPM operation is based on the guide data.

55. The method of claim 54 wherein the inspection data used to generate the guide data only represents a boundary of the sample.

56. The method of claim 54 wherein generating the guide data comprises:

comparing the inspection data with target data; and

if the target data and the inspection data do not match within a predefined tolerance level, generating guide data for guiding the performance of a modification that needs to be made to the sample to fall within the tolerance level.

57. The method of claim 55, and further comprising repeating said performing an inspection of the sample, said generating guide data, and said performing an additional SPM operation.

58. In a scanning probe microscope and/or nanomachining system having scanning probe functional elements and non-scanning-probe functional elements, the system including one or more SPM probes and/or tools, the one or more SPM probes and/or tools collectively being referred to as the probe, positioned relative to a sample and having relative motion between the probe and the sample in the X, Y and Z space and controlled and sensed in desired directions with respect to the sample and/or any element thereof, the sample and/or any element thereof collectively being referred to as the sample, and producing data responsive to the sample and/or a property of the sample, a method for accurately measuring a parameter of the sample or performing a task related to the sample, the method comprising:

performing an inspection of the sample using the probe to produce SPM inspection data representative of the sample;

using the inspection data to locate and identify a reference point on the existing sample;

receiving guide data from one of the non-scanning-probe functional elements, the guide data being independent of the inspection data; and

using the reference point and the guide data to perform an additional SPM operation on the sample.

59. The method of claim 58 wherein the inspection data represents a true surface of the sample, the data representing the true surface including a portion where there are values for at least two Z coordinates corresponding to the same X-Y coordinate pair.

60. The method of claim 58 wherein the reference point is located and identified by comparing the inspection data with target data for the sample.