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Thin film bulk acoustic resonator, method for producing the same, filter, composite electronic component device, and communication device

  • US 20050057324A1
  • Filed: 09/08/2004
  • Published: 03/17/2005
  • Est. Priority Date: 09/12/2003
  • Status: Active Grant
First Claim
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1. A thin film bulk acoustic resonator comprising:

  • a piezoelectric film; and

    a pair of electrodes between which the piezoelectric film is interposed, wherein, the piezoelectric film includes an outer region extending outwards from at least a portion of a periphery of a resonator portion composed of the pair of electrodes and the piezoelectric film, and the outer region includes, in at least a portion thereof, an acoustic damping region for damping acoustic waves.

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