Low-friction moving interfaces in micromachines and nanomachines
First Claim
Patent Images
1. A low-friction device having a moving interface, the low-friction device comprising first and second members wherein:
- each of the members has a maximum dimension of about 100 μ
m or less between any two points;
at least the first member is formed of diamond; and
the first and second members are in sliding contact.
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Abstract
A low-friction device having a moving interface comprising first and second members. Each of the members has a maximum dimension of about 100 μm or less between any two points. At least the first member is formed of diamond and the first and second members are in sliding contact or meshing contact.
96 Citations
33 Claims
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1. A low-friction device having a moving interface, the low-friction device comprising first and second members wherein:
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each of the members has a maximum dimension of about 100 μ
m or less between any two points;
at least the first member is formed of diamond; and
the first and second members are in sliding contact. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A low-friction device having a moving interface comprising:
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a toothed member having a maximum dimension of about 100 μ
m or less between any two points; and
a tooth-engaging member having a maximum dimension of about 100 μ
m or less between any two points;
at least one of the toothed member and tooth-engaging member being diamond; and
the toothed member and the tooth-engaging member being in meshing contact. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A low-friction device having a moving interface comprising:
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a diamond gear having a maximum dimension of about 100 μ
m or less between any two points; and
a silicon gear having a maximum dimension of about 100 μ
m or less between any two points;
wherein the diamond gear and the silicon gear are in meshing contact.
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23. A low-friction moving interface comprising:
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a diamond bearing having a maximum dimension of about 100 μ
m or less between any two points; and
a silicon spindle having a maximum dimension of about 100 μ
m or less between any two points;
wherein the bearing and spindle are in sliding contact.
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24. A low-friction device having a moving interface comprising:
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a silicon plate having a diamond coated aperture, the coated aperture having a diameter in the range of about 100 μ
m to about 5 μ
m; and
a spindle fitted into the diamond coated aperture in sliding contact, the spindle having a maximum dimension of about 100 μ
m or less between any two points.
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25. A low-friction device having a moving interface comprising:
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a silicon plate formed with an aperture having a diameter in the range of about 100 μ
m to about 5 μ
m;
a diamond bushing inside the aperture; and
a spindle having a maximum dimension of about 100 μ
m or less between any two points;
wherein the diamond bushing and the spindle are in sliding contact. - View Dependent Claims (26)
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27. A low-friction device having a moving interface comprising first, second, and third plates, wherein:
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each of the first, second, and third plates has a maximum dimension of about 100 μ
m or less between any two points; and
the third plate is diamond; and
the third plate has a rotational degree of freedom and is in sliding contact with the first and second plates. - View Dependent Claims (28, 29)
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30. A low-friction device comprising first and second plates, wherein:
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each of the first and second plates has a maximum dimension of about 100 μ
m or less between any two points;
one of the first and second plates is diamond;
the other of the first and second plate is silicon; and
the first and second plates are in sliding contact. - View Dependent Claims (31, 32, 33)
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Specification