Porous retroreflection suppression plates, optical isolators and method of fabricating same
First Claim
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1. A light scattering plate comprising:
- a substrate or host wafer having a first and a second surface and further including plural substantially uniform, parallel, uncoupled leaky waveguides defined at least partially therethrough, the plural leaky waveguides defining axes that are substantially perpendicular to the wafer first surface, the plural leaky waveguides each supporting at least one waveguide mode in a predetermined spectral range
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Abstract
A plate having leaky waveguides defined therethrough can be used for retroreflection suppression and/or light diffusing/optical isolation. Such designs can exhibit good performance over a wider range of wavelengths and angles of the incident light than current art optical components.
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Citations
67 Claims
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1. A light scattering plate comprising:
a substrate or host wafer having a first and a second surface and further including plural substantially uniform, parallel, uncoupled leaky waveguides defined at least partially therethrough, the plural leaky waveguides defining axes that are substantially perpendicular to the wafer first surface, the plural leaky waveguides each supporting at least one waveguide mode in a predetermined spectral range - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. An optical isolation component for transmitting light propagating in a first direction and absorbing light propagating in the opposite direction, within at least some spectral band comprising:
a substrate or host wafer having a first and a second surface and further including plural, substantially uniform, parallel, uncoupled leaky waveguides defined at least partially therethrough, the plural leaky waveguides having axes that are substantially perpendicular to the wafer first surface, the plural leaky waveguides each supporting at least one waveguide mode in a predetermined spectral range, the plural waveguides having coherently asymmetrically modulated cross-sections along the directions of the axes over at least some part of the length of said waveguides. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41)
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42. A method of making a light scattering plate comprising:
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providing a substrate wafer of (100)-oriented single-crystal silicon having a first surface and a second surface, electrochemically etching the substrate wafer to produce a structured layer having pores with controlled depths defined at least partially therethrough, removing at least one un-etched portion of the substrate wafer, and coating the pore walls with at least one metal layer, said material having a thickness of at least 10 nm. - View Dependent Claims (43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53)
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54. A method of making an optical isolation component comprising:
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providing a semiconductor wafer substrate having a first surface and a second surface, electrochemically etching the substrate wafer to produce a structured layer having pores with controlled depths and coherently, modulated diameters defined at least partially therethrough, and coating the pores with at least one metal layer, said metal layer having a thickness of at least 10 nm. - View Dependent Claims (55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67)
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Specification