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Systems and methods for mastering microstructures through a substrate using negative photoresist and microstructure masters so produced

  • US 20050058948A1
  • Filed: 09/11/2003
  • Published: 03/17/2005
  • Est. Priority Date: 09/11/2003
  • Status: Active Grant
First Claim
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1. A method of fabricating microstructures comprising:

  • impinging a radiation beam through a substrate that is transparent thereto into a radiation sensitive layer on the substrate to image the microstructures in the radiation sensitive layer.

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  • 5 Assignments
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