INSPECTION SYSTEM AND APPARATUS
First Claim
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1. A method of inspecting a sample'"'"'s surface with an inspection system, comprising the steps of:
- providing a sample having a surface;
providing a non-vibrating contact potential probe;
scanning the sample'"'"'s surface with the non-vibrating contact potential probe by causing relative motion between the non-vibrating contact potential probe and the sample'"'"'s surface;
measuring contact potential difference between the sample'"'"'s surface and the non-contact potential probe;
generating a first signal portion characteristic of a topographical feature of the sample'"'"'s surface and further having a second signal portion representing chemical features of the sample'"'"'s surface.
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Abstract
A method and system for identifying a defect or contamination on a surface of a material. The method and system involves providing a material, such as a semiconductor wafer, using a non-vibrating contact potential difference sensor to scan the wafer, generate contact potential difference data and processing that data to identify a pattern characteristic of the defect or contamination.
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Citations
24 Claims
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1. A method of inspecting a sample'"'"'s surface with an inspection system, comprising the steps of:
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providing a sample having a surface;
providing a non-vibrating contact potential probe;
scanning the sample'"'"'s surface with the non-vibrating contact potential probe by causing relative motion between the non-vibrating contact potential probe and the sample'"'"'s surface;
measuring contact potential difference between the sample'"'"'s surface and the non-contact potential probe;
generating a first signal portion characteristic of a topographical feature of the sample'"'"'s surface and further having a second signal portion representing chemical features of the sample'"'"'s surface. - View Dependent Claims (3, 4, 5, 6, 7, 12, 13, 14, 15, 16, 17, 18, 19)
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2. The method of inspecting a sample'"'"'s surface further comprising the step of amplifying the topographical signal relative to the chemical signal.
- 8. The method of inspecting a sample'"'"'s surface of claim 8, wherein the plurality of probes are arranged in a linear array.
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20. A system for identifying features on the surface of a sample comprising:
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a non-vibrating contact potential difference sensor;
a mechanism for causing relative motion between the sample and the non-vibrating contact potential difference sensor;
a mechanism for measuring contact potential difference between the sample and the non-vibrating contact potential probe;
a generated signal representing the contact potential difference; and
a generated bias voltage applied to a portion of the system chosen from the group consisting of the sample, the non-vibrating contact potential probe, and combinations thereof. - View Dependent Claims (21, 22, 23)
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24. A system for inspecting the surface of a sample comprising:
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a non-vibrating contact potential difference sensor;
a chuck for rotating the sample about a central axis;
the chuck having a variable speed control mechanism for changing rotational velocity in proportion with the motion of the probe to provide the probe with substantially even data density; and
a source of data representing a contact potential difference between the non-vibrating contact potential difference sensor and the surface of the sample.
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Specification