Method to prevent damage to probe card
First Claim
1. A method of forming a probe card comprising:
- providing a substrate having a first surface and a second surface;
disposing a plurality of conductive traces adjacent at least one of the first surface and the second surface;
providing a plurality probe elements in electrical communication with the plurality of conductive traces; and
providing a plurality of fuse elements in respective electrical communication with at least some of the plurality of conductive traces, at least some of the plurality of fuse elements disposed immediately adjacent at least one of the first surface and the second surface.
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Accused Products
Abstract
Method of forming probe cards is configured with protective circuitry suitable for use in electrical testing of semiconductor dice without damage to the probe cards. Protective fuses are provided in electrical communication with conductive traces and probe elements (e.g., probe needles) of a probe card. The fuses may be active or passive fuses and are preferably self-resetting, repairable, and/or replaceable. Typically, the fuses will be interposed in, or located adjacent to, conductive traces residing over a surface of the probe card. Methods of fabricating a probe card are provided, as well as various probe card configurations. A semiconductor die testing system using the probe card is also provided.
33 Citations
54 Claims
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1. A method of forming a probe card comprising:
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providing a substrate having a first surface and a second surface;
disposing a plurality of conductive traces adjacent at least one of the first surface and the second surface;
providing a plurality probe elements in electrical communication with the plurality of conductive traces; and
providing a plurality of fuse elements in respective electrical communication with at least some of the plurality of conductive traces, at least some of the plurality of fuse elements disposed immediately adjacent at least one of the first surface and the second surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of fabricating a probe card comprising:
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providing a probe card substrate;
providing a plurality of conductive traces adjacent a surface of the probe card substrate;
providing a plurality of probe elements in electrical communication with the plurality of conductive traces, at least one probe element of the plurality of probe elements configured for supplying a test signal to at least one semiconductor die; and
providing at least one repairable or replaceable fuse component in electrical communication with at least one of the plurality of conductive traces. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19)
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20. A method of forming a probe card using a substrate having a first surface and a second surface comprising:
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disposing a plurality of conductive traces adjacent at least one of the first surface and the second surface;
placing a plurality of probe elements in electrical communication with the plurality of conductive traces; and
placing a plurality of fuse elements in respective electrical communication with at least some of the plurality of conductive traces, at least some of the plurality of fuse elements disposed immediately adjacent at least one of the first surface and the second surface. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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31. A method of fabricating a probe card using a probe card substrate comprising:
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forming a plurality of conductive traces adjacent a surface of the probe card substrate;
providing a plurality of probe elements in electrical communication with the plurality of conductive traces, at least one probe element of the plurality of probe elements configured for supplying a test signal to at least one semiconductor die; and
providing at least one repairable or replaceable fuse component in electrical communication with at least one of the plurality of conductive traces. - View Dependent Claims (32, 33, 34, 35, 36, 37, 38)
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39. A method of fabricating a probe card using a probe card substrate comprising:
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forming a plurality of conductive traces adjacent a surface of the probe card substrate;
installing a plurality of probe elements in electrical communication with the plurality of conductive traces, at least one probe element of the plurality of probe elements configured for supplying a test signal to at least one semiconductor die; and
providing at least one repairable or replaceable fuse component in electrical communication with at least one of the plurality of conductive traces. - View Dependent Claims (40, 41, 42, 43, 44, 45, 46)
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47. A method of fabricating a probe card using a probe card substrate comprising:
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forming a plurality of conductive traces adjacent a surface of the probe card substrate;
forming a plurality of probe elements in electrical communication with the plurality of conductive traces, at least one probe element of the plurality of probe elements configured for supplying a test signal to at least one semiconductor die; and
providing at least one repairable or replaceable fuse component in electrical communication with at least one of the plurality of conductive traces. - View Dependent Claims (48, 49, 50, 51, 52, 53, 54)
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Specification