Gas processing apparatus, gas processing method and integrated valve unit for gas processing apparatus
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Accused Products
Abstract
A process gas line (255) for carrying WF6 gas for nucleation, a process gas line (257) for carrying WF6 gas for film deposition after nucleation are joined at a single joint (280) to a carrier gas line (256). A gas line (271) is connected to the joint (280) to carry a mixed gas of the carrier gas and WF6 gas to a processing chamber defined by a processing vessel. Sections of the carrier gas line (256) and the gas line (271) extending on the opposite sides of the joint (280) extend along a straight line, and the process gas lines (255, 257) are perpendicular to the gas line (271).
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Citations
31 Claims
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1-16. -16. (Canceled).
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17. A gas processing apparatus comprising:
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a processing vessel;
a carrier gas line connecting a carrier gas source to the processing vessel; and
a first process gas line connected to the carrier gas line at a first junction to supply a first process gas into the carrier gas line so that the first process gas is carried by the carrier gas into the processing vessel;
wherein an axis of the carrier gas line extends straightly at least in an area from a position upstream of the first junction to a position downstream of the first junction, and an axis of the first process gas line intersects the axis of the carrier gas line at an angle at the first junction. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25)
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26. A gas processing apparatus comprising:
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a processing vessel;
a carrier gas line connected to the processing vessel;
a process gas line connected to the carrier gas line at a junction to supply a process gas into the carrier gas line so that the process gas is carried by the carrier gas into the processing vessel; and
a shutoff valve arranged in the process gas line arranged in the process gas line at a position upstream of the junction, wherein a distance from the position in the process gas line to the junction and a sectional area of the process gas line are so determined that an amount of the process gas that flows out from the process gas line into the carrier gas line after the shutoff valve has been closed is not greater than a predetermined value.
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27. A gas processing method comprising the steps of:
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supplying a carrier gas into a carrier gas line connected to a processing vessel;
supplying a first process gas into the carrier gas line through a first process gas line so that the fist process gas is carried by the carrier gas to the processing vessel, wherein the first process gas line is connected to the carrier gas line at a first junction, and an axis of the carrier gas line extends straightly at least in an area from a position upstream of the first junction to a position downstream of the first junction, and an axis of the first process gas line intersects the axis of the carrier gas line at an angle at the first junction; and
processing a substrate placed in the processing vessel by a gas process using the process gas. - View Dependent Claims (28, 29, 30, 31)
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Specification