MEMS digital-to-acoustic transducer with error cancellation
First Claim
1. A method of fabricating a flexible diaphragm on a substrate, comprising:
- forming a layer on a substrate;
forming a micromachined membrane from said layer; and
sealing said membrane.
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Abstract
An acoustic transducer comprising a substrate; and a diaphragm formed by depositing a micromachined membrane onto the substrate. The diaphragm is formed as a single silicon chip using a CMOS MEMS (microelectromechanical systems) semiconductor fabrication process. The curling of the diaphragm during fabrication is reduced by depositing the micromachined membrane for the diaphragm in a serpentine-spring configuration with alternating longer and shorter arms. As a microspeaker, the acoustic transducer of the present invention converts a digital audio input signal directly into a sound wave, resulting in a very high quality sound reproduction at a lower cost of production in comparison to conventional acoustic transducers. The micromachined diaphragm may also be used in microphone applications.
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Citations
19 Claims
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1. A method of fabricating a flexible diaphragm on a substrate, comprising:
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forming a layer on a substrate;
forming a micromachined membrane from said layer; and
sealing said membrane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of fabricating a transducer, comprising:
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fabricating electronics on a substrate using CMOS processes;
forming a layer on a substrate;
forming a micromachined membrane from said layer; and
sealing said membrane to form a diaphragm, said diaphragm being in communication with said electronics. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification