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MEMS digital-to-acoustic transducer with error cancellation

  • US 20050061770A1
  • Filed: 09/20/2004
  • Published: 03/24/2005
  • Est. Priority Date: 09/13/1999
  • Status: Active Grant
First Claim
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1. A method of fabricating a flexible diaphragm on a substrate, comprising:

  • forming a layer on a substrate;

    forming a micromachined membrane from said layer; and

    sealing said membrane.

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