Electrostatically actuated valve
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Abstract
An electrostatically actuated valve that is relatively small, has relatively low fabrication costs, and consumes relatively low voltage and/or power. Normally closed, normally open, three (or more) way valves, and other configurations are contemplated. These electrostatically actuated valves are suitable for a wide variety of applications, including but not limited to, low power and wireless applications, for example.
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Citations
36 Claims
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1-16. -16. (Canceled).
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17. An electrostatic actuated valve comprising:
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a body forming a chamber;
the chamber having an inlet port, a first outlet port, and a second outlet port;
a diaphragm mounted in the chamber, said diaphragm having a first position that allows fluid communication between the inlet port and the first outlet port while restricting fluid communication between the inlet port and the second outlet port, and a second position that allows fluid communication between the inlet port and the second outlet port while restricting fluid communication between the inlet port and the first outlet port;
a first electrode secured relative to the diaphragm;
a second electrode secured relative to the body; and
wherein the diaphragm is electrostatically actuated between the first position and the second position when a voltage is applied between the first electrode and the second electrode. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26)
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27. An electrostatic actuated valve for controlling fluid flow between an inlet and an outlet, the valve comprising:
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a body forming a chamber having a first port coupled to the inlet, a second port coupled to the inlet, and a third port coupled to the outlet;
a diaphragm mounted in the chamber, having a first position restricting fluid flow between the second port and the third port and a second position allowing fluid flow between the second port and the third port;
a first electrode secured relative to the diaphragm; and
a second electrode secured relative to the body;
wherein the diaphragm and electrodes are placed such that, when a voltage is applied between the first electrode and the second electrode, the diaphragm electrostatically actuates between the first position and the second position. - View Dependent Claims (28)
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29. An electrostatic actuated valve comprising:
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a body forming a chamber;
the chamber having a first port and a second port;
a diaphragm mounted in the chamber, said diaphragm having a first position that restricts fluid from flowing between the first port and the second port, and a second position that allows fluid to flow between the first port and the second port;
a first electrode secured relative to the diaphragm; and
a second electrode secured relative to the body;
wherein;
the diaphragm is configured to be electrostatically actuated between the first position and the second position when a voltage is applied between the first electrode and the second electrode; and
the chamber has a first opposing wall and a second opposing wall, the first opposing wall and the second opposing wall being configured such that the spacing between the first opposing wall and the second opposing wall is smaller in a first region of the chamber than in an adjacent second region. - View Dependent Claims (30)
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31. An electrostatic actuated valve comprising:
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a body forming a chamber;
the chamber having a first port, a second port, and a third port;
a diaphragm mounted in the chamber, said diaphragm having a first position that allows fluid communication between the first port and the second port while restricting fluid communication between the first port and the third port, and a second position that allows fluid communication between the first port and the third port while restricting fluid communication between the first and the second port;
a first electrode secured relative to the diaphragm;
a second electrode secured relative to the body; and
wherein the diaphragm and electrodes are configured for electrostatic actuation between the first position and the second position when a voltage is applied between the first electrode and the second electrode. - View Dependent Claims (32, 33, 34, 35, 36)
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Specification