Electrostatically actuated valve

• US 20050062001A1
• Filed: 11/03/2004
• Published: 03/24/2005
• Est. Priority Date: 06/19/2002
• Status: Active Grant

• Current Assignee: Cleopatra Cabuz, Eugen I. Cabuz
• Original Assignee: Cleopatra Cabuz, Eugen I. Cabuz
• Inventors: Cabuz, Cleopatra, Cabuz, Eugen I.
• Granted Patent: US 6,968,862 B2
• Time in Patent Office: Days
• US Class Current: 251/129.10
• CPC Class Codes: F15C 5/00 Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
• CPC Class Codes: F16K 31/02 electric F16K31/004 takes precedence; magnetic
• CPC Class Codes: F16K 99/0001 Microvalves microdevices B81B1/00; manufacture or treatment of devices or systems in or on a substrate B81C1/00; microfluidic structures B01L3/5027; micropumps F04B19/006
• CPC Class Codes: F16K 99/0015 Diaphragm or membrane valves
• CPC Class Codes: F16K 99/0028 Valves having multiple inlets or outlets
• CPC Class Codes: F16K 99/0051 using electrostatic means
• CPC Class Codes: Y10T 137/86879 Reciprocating valve unit
• CPC Class Codes: Y10T 137/87788 With valve or movable deflector at junction

Abstract

An electrostatically actuated valve that is relatively small, has relatively low fabrication costs, and consumes relatively low voltage and/or power. Normally closed, normally open, three (or more) way valves, and other configurations are contemplated. These electrostatically actuated valves are suitable for a wide variety of applications, including but not limited to, low power and wireless applications, for example.

Claims

1-16. -16. (Canceled).

17. An electrostatic actuated valve comprising:

a body forming a chamber;

the chamber having an inlet port, a first outlet port, and a second outlet port;

a diaphragm mounted in the chamber, said diaphragm having a first position that allows fluid communication between the inlet port and the first outlet port while restricting fluid communication between the inlet port and the second outlet port, and a second position that allows fluid communication between the inlet port and the second outlet port while restricting fluid communication between the inlet port and the first outlet port;

a first electrode secured relative to the diaphragm;

a second electrode secured relative to the body; and

wherein the diaphragm is electrostatically actuated between the first position and the second position when a voltage is applied between the first electrode and the second electrode.

18. An electrostatic actuated valve according to claim 17 wherein the chamber includes a first opposing wall and a second opposing wall, the inlet port and the second outlet port extending through the first opposing wall and the first outlet port extending through the second opposing wall.

19. An electrostatic actuated valve according to claim 18 wherein the diaphragm includes at least one opening.

20. An electrostatic actuated valve according to claim 19 wherein the diaphragm covers or otherwise restricts fluid flow through the second outlet port and allows fluid flow between the inlet port and the first outlet port via the at least one opening in the diaphragm in the first position.

21. An electrostatic actuated valve according to claim 20 wherein the diaphragm uncovers and allows fluid flow between the inlet port and the second outlet port in the second position.

22. An electrostatic actuated valve according to claim 21 wherein the at least one opening in the diaphragm is restricted when the diaphragm is in the second position, thereby restricting fluid flow between the inlet port and the first outlet port.

23. An electrostatic actuated valve according to claim 17 wherein the chamber has a first opposing wall and a second opposing wall, the first opposing wall and the second opposing wall being configured such that the spacing between the first opposing wall and the second opposing wall is smaller in a first region of the chamber than in an adjacent second region, the diaphragm being mounted between the first opposing wall and the second opposing wall such that the diaphragm is electrostatically pulled toward the second electrode in a rolling action beginning in the first region.

24. An electrostatic actuated valve according to claim 17 wherein the diaphragm has an opening therethrough such that:

when the diaphragm is in the first position the opening is occluded; and

when the diaphragm is in the second position the opening is not occluded.

25. An electrostatic actuated valve according to claim 24 wherein the opening is placed in alignment with the inlet port, such that when the diaphragm is in the first position, the opening is adjacent the inlet port, and when the diaphragm is in the second position, the opening is not adjacent the inlet port.

26. An electrostatic actuated valve according to claim 25 wherein:

the chamber includes first and second opposing walls;

the inlet port is on the first wall; and

when the diaphragm is in the second position the opening, is occluded by the second wall.

27. An electrostatic actuated valve for controlling fluid flow between an inlet and an outlet, the valve comprising:

a body forming a chamber having a first port coupled to the inlet, a second port coupled to the inlet, and a third port coupled to the outlet;

a diaphragm mounted in the chamber, having a first position restricting fluid flow between the second port and the third port and a second position allowing fluid flow between the second port and the third port;

a first electrode secured relative to the diaphragm; and

a second electrode secured relative to the body;

wherein the diaphragm and electrodes are placed such that, when a voltage is applied between the first electrode and the second electrode, the diaphragm electrostatically actuates between the first position and the second position.

28. An electrostatic actuated valve as in claim 27 wherein the diaphragm is disposed within the chamber such that the first port is fluidly isolated from the second port and the third port.

29. An electrostatic actuated valve comprising:

a body forming a chamber;

the chamber having a first port and a second port;

a diaphragm mounted in the chamber, said diaphragm having a first position that restricts fluid from flowing between the first port and the second port, and a second position that allows fluid to flow between the first port and the second port;

a first electrode secured relative to the diaphragm; and

a second electrode secured relative to the body;

wherein;

the diaphragm is configured to be electrostatically actuated between the first position and the second position when a voltage is applied between the first electrode and the second electrode; and

the chamber has a first opposing wall and a second opposing wall, the first opposing wall and the second opposing wall being configured such that the spacing between the first opposing wall and the second opposing wall is smaller in a first region of the chamber than in an adjacent second region.

30. An electrostatic actuated valve according to claim 29 wherein:

the first port extends through the first opposing wall and into the chamber and the second port extends through the second opposing wall and into the chamber;

the diaphragm being mounted between the first opposing wall and the second opposing wall, and having at least one opening that is laterally offset from the first port in the first opposing wall when the diaphragm is positioned in a first position adjacent the first opposing wall;

the second electrode being secured relative to the second opposing wall;

wherein the diaphragm is electrostatically pulled toward the second opposing wall when a voltage is applied between the first electrode and the second electrode, thereby allowing fluid to flow between the first port and the second port via the at least one opening in the diaphragm.

31. An electrostatic actuated valve comprising:

a body forming a chamber;

the chamber having a first port, a second port, and a third port;

a diaphragm mounted in the chamber, said diaphragm having a first position that allows fluid communication between the first port and the second port while restricting fluid communication between the first port and the third port, and a second position that allows fluid communication between the first port and the third port while restricting fluid communication between the first and the second port;

a first electrode secured relative to the diaphragm;

a second electrode secured relative to the body; and

wherein the diaphragm and electrodes are configured for electrostatic actuation between the first position and the second position when a voltage is applied between the first electrode and the second electrode.

32. An electrostatic actuated valve according to claim 31 wherein the chamber has a first opposing wall and a second opposing wall, the first opposing wall and the second opposing wall being configured such that the spacing between the first opposing wall and the second opposing wall is smaller in a first region of the chamber than in an adjacent second region.

33. The electrostatic actuated valve of claim 32 wherein, the diaphragm is mounted between the first opposing wall and the second opposing wall such that the diaphragm is electrostatically pulled toward the second electrode in a rolling action beginning in the first region.

34. An electrostatic actuated valve according to claim 32 wherein the diaphragm has an opening therethrough placed such that:

when the diaphragm is in the first position the opening is occluded; and

when the diaphragm is in the second position the opening is not occluded.

35. An electrostatic actuated valve according to claim 34 wherein the opening is placed in alignment with the first port, such that when the diaphragm is in the second position, the opening is adjacent the first port, and when the diaphragm is in the second position, the opening is not adjacent the first port.

36. An electrostatic actuated valve according to claim 35 wherein:

the chamber includes first and second opposing walls;

the first port is on the first wall; and

,

when the diaphragm is in the second position, the opening is occluded by the second wall.