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Stepping electrostatic comb drive actuator

  • US 20050062361A1
  • Filed: 09/22/2003
  • Published: 03/24/2005
  • Est. Priority Date: 09/22/2003
  • Status: Abandoned Application
First Claim
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1. An electrostatic stepping comb drive actuator, comprising:

  • a first member comprising;

    a first tooth and a second tooth each comprising;

    a first surface, the first surface of the first tooth opposite the first surface of the second tooth;

    first conductors, and a first electrode array located on the first surfaces and comprising first electrodes in first electrode groups, the first electrodes in each of the first electrode groups electrically connected to a same one of the first conductors; and

    a second member comprising;

    a third tooth interdigitated with the first tooth and the second tooth and movable in a direction of travel relative thereto, the third tooth comprising;

    a second surface disposed opposite each of the first surfaces, second conductors, and a second electrode array located on the second surfaces, the second electrode array comprising second electrodes in second electrode groups, the second electrodes in each second electrode group electrically connected to the same one of the second conductors.

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