Stepping electrostatic comb drive actuator
First Claim
1. An electrostatic stepping comb drive actuator, comprising:
- a first member comprising;
a first tooth and a second tooth each comprising;
a first surface, the first surface of the first tooth opposite the first surface of the second tooth;
first conductors, and a first electrode array located on the first surfaces and comprising first electrodes in first electrode groups, the first electrodes in each of the first electrode groups electrically connected to a same one of the first conductors; and
a second member comprising;
a third tooth interdigitated with the first tooth and the second tooth and movable in a direction of travel relative thereto, the third tooth comprising;
a second surface disposed opposite each of the first surfaces, second conductors, and a second electrode array located on the second surfaces, the second electrode array comprising second electrodes in second electrode groups, the second electrodes in each second electrode group electrically connected to the same one of the second conductors.
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Accused Products
Abstract
An electrostatic stepping comb drive actuator has a first tooth and a second tooth. Each tooth has a first surface, with the first surface of the first tooth opposite the first surface of the second tooth, first conductors, and a first electrode array located on the first surfaces. The first electrode array includes first electrodes in first electrode groups. The comb drive actuator further includes a second member having a third tooth interdigitated with the first tooth and the second tooth such that relative motion is possible between the third tooth and the first and second teeth. The third tooth includes a second surface disposed opposite each of the first surfaces, second conductors, and a second electrode array located on the second surfaces. The second electrode array includes second electrodes in second electrode groups. The second electrodes in each second electrode group are electrically connected to the same one of the second conductors.
25 Citations
24 Claims
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1. An electrostatic stepping comb drive actuator, comprising:
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a first member comprising;
a first tooth and a second tooth each comprising;
a first surface, the first surface of the first tooth opposite the first surface of the second tooth;
first conductors, and a first electrode array located on the first surfaces and comprising first electrodes in first electrode groups, the first electrodes in each of the first electrode groups electrically connected to a same one of the first conductors; and
a second member comprising;
a third tooth interdigitated with the first tooth and the second tooth and movable in a direction of travel relative thereto, the third tooth comprising;
a second surface disposed opposite each of the first surfaces, second conductors, and a second electrode array located on the second surfaces, the second electrode array comprising second electrodes in second electrode groups, the second electrodes in each second electrode group electrically connected to the same one of the second conductors. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An electrostatic stepping comb drive actuator, comprising:
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a stationary member having a tooth, the tooth comprising;
opposed surfaces, and a first electrode array disposed on the first surfaces;
a first conductor coupled to the first electrode array;
a moveable member comprising second electrode arrays disposed on surfaces opposite the first surfaces; and
second conductors electrically connected to the second electrode arrays. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21)
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22. An electrostatic comb drive actuator, comprising:
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a tooth, comprising;
opposed first surfaces, and a first electrode array located on the first surfaces, the first electrode array comprising first electrodes;
an interconnected pair of coupled teeth, comprising;
second surfaces opposite the first surfaces, and second electrode arrays located on the second surfaces, the second electrode arrays comprising second electrodes. - View Dependent Claims (23, 24)
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Specification