Safe liquid source containers
First Claim
1. A liquid source chemical vaporizer for vaporizing liquid source chemical and delivering vapor phase chemical, comprising:
- a container configured to hold liquid source chemical up to a liquid fill level and to additionally define an inner gas volume;
a carrier gas inlet communicating carrier gas into the container;
a gas outlet communicating with the inner gas volume of the container; and
a porous element positioned to be in contact with liquid source chemical and in contact with the inner gas volume within the container.
1 Assignment
0 Petitions
Accused Products
Abstract
Containers for providing vapor phase reactant from liquid sources include bubbler designs and designs in which carrier gas flows over the liquid surface. Among the bubbler arrangements, a bypass conductance is provided to release excess pressure from the gas volume inside the container, or an enlarged bubbler tube is provided with a volume sufficient to accommodate all possible liquid backflow without having the liquid exit the container. Among the overflow designs, flow dividers provide a tortuous path for the gas to increase the time exposure of carrier gas packets to the evaporating liquid surface. The flow dividers can be microporous to encourage capillary action, thereby increasing the evaporating surface. The tortuous gas flow path can be separated from the liquid phase by a breathable semi-porous membrane that permits vapor phase reactant to pass through but prohibits liquid from passing in the other direction.
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Citations
42 Claims
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1. A liquid source chemical vaporizer for vaporizing liquid source chemical and delivering vapor phase chemical, comprising:
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a container configured to hold liquid source chemical up to a liquid fill level and to additionally define an inner gas volume;
a carrier gas inlet communicating carrier gas into the container;
a gas outlet communicating with the inner gas volume of the container; and
a porous element positioned to be in contact with liquid source chemical and in contact with the inner gas volume within the container. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A liquid source chemical vaporizer, comprising:
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an outer container configured to hold liquid source chemical;
a carrier gas inlet communicating with an inner gas volume defined within the outer container;
a gas mixture outlet communicating with the inner gas volume; and
at least one flow divider defining a gas flow path through the inner gas volume. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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33. A liquid source bubbler system, comprising:
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a container configured to hold liquid source chemicals;
a bubbler tube communicating with an inert gas source, the bubbler tube extending into an opening within a liquid storage space;
a gas outlet communicating with an inner gas space defined within the container above the liquid storage space; and
a by-pass conductance route, configured to release excess gas pressure from within the inner gas space to the gas inlet, thereby inhibiting liquid flow up the bubbler tube. - View Dependent Claims (34, 35, 36, 37, 38, 39, 40, 41, 42)
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Specification