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Safe liquid source containers

  • US 20050066893A1
  • Filed: 09/29/2003
  • Published: 03/31/2005
  • Est. Priority Date: 09/29/2003
  • Status: Active Grant
First Claim
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1. A liquid source chemical vaporizer for vaporizing liquid source chemical and delivering vapor phase chemical, comprising:

  • a container configured to hold liquid source chemical up to a liquid fill level and to additionally define an inner gas volume;

    a carrier gas inlet communicating carrier gas into the container;

    a gas outlet communicating with the inner gas volume of the container; and

    a porous element positioned to be in contact with liquid source chemical and in contact with the inner gas volume within the container.

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