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Micro-sensor

  • US 20050067695A1
  • Filed: 10/08/2002
  • Published: 03/31/2005
  • Est. Priority Date: 10/29/2001
  • Status: Active Grant
First Claim
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1. A microsensor comprising:

  • a sensor element; and

    a first integrated circuit comprising;

    a semiconductor body; and

    a second integrated circuit;

    wherein the sensor element is on a main surface of the semiconductor body; and

    wherein a eutectic connection couples the semiconductor body and the sensor element.

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