Plasma surface modification and passivation of organo-silicate glass films for improved hardmask adhesion and optimal RIE processing
First Claim
1. An interconnect structure comprising:
- one or more interconnect levels, one on top of each other, each level comprising a organo-silicate glass (OSG) dielectric material having a plasma treated surface layer that provides improved adhesion to an overlying lower hardmask, yet is substantially undamaged.
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Abstract
Interconnect structure having enhanced adhesion between the various interfaces encompassing an organo-silicate glass (OSG) film, for use in semiconductor devices is provided herein. The novel interconnect structure includes a non-damaged plasma-treated low-k OSG surface to enhance the adhesion of the hardmask material to the OSG surface, and an unique deposition scheme for the hardmasks in order to make the entire structure pliant towards implementing mild processing condition during the reactive ion etch patterning of the dielectric structure in a damascene and dual-damascene scheme. The methods for making a semiconductor device having an enhanced adhesion and micromasks free profiles are also provided.
29 Citations
19 Claims
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1. An interconnect structure comprising:
one or more interconnect levels, one on top of each other, each level comprising a organo-silicate glass (OSG) dielectric material having a plasma treated surface layer that provides improved adhesion to an overlying lower hardmask, yet is substantially undamaged. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of forming an interconnect structure comprising:
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plasma treating an OSG dielectric layer to provide a plasma-treated OSG surface layer that provides improved adhesion to an overlying lower hardmask, said plasma-treated OSG surface layer is chemically and electrical unaltered from the bulk of the OSG dielectric layer; and
forming said lower hardmask atop the plasma-treated OSG surface layer. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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19. A method of forming an interconnect structure comprising:
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providing an integrated circuit that includes a dielectric cap layer located thereon;
forming an organo-silicate glass (OSG) dielectric layer on said dielectric cap layer; and
plasma treating the OSG dielectric layer to provide a plasma-treated OSG surface layer that provides improved adhesion to an overlying lower hardmask, said plasma-treated OSG surface layer is chemically and electrical unaltered from the bulk of the OSG dielectric layer;
in-situ forming said lower hardmask atop the plasma-treated OSG surface layer; and
in-situ forming an upper hardmask atop said lower hardmask.
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Specification