Tunable optical filter and method of manufacturing same
First Claim
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1. A tunable optical filter comprising:
- a movable unit supporting a movable body that moves up and down freely, a movable mirror being formed on one surface of the movable body;
a drive electrode unit in which a drive electrode facing the movable body with a given electrostatic gap therebetween is formed; and
an optical gap unit in which a fixed mirror facing the movable mirror with a given optical gap therebetween is formed, the optical gap unit, the drive electrode unit, and the movable unit being joined to each other.
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Abstract
A tunable optical filter is provided by joining a movable unit that supports a movable body moving up and down freely, and whose top surface has a highly reflective film formed thereon, a drive electrode unit in which a drive electrode facing the movable body with an electrostatic gap EG therebetween is formed, and an optical gap unit in which a highly reflective film facing the highly reflective film with an optical gap OG therebetween is formed.
163 Citations
15 Claims
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1. A tunable optical filter comprising:
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a movable unit supporting a movable body that moves up and down freely, a movable mirror being formed on one surface of the movable body;
a drive electrode unit in which a drive electrode facing the movable body with a given electrostatic gap therebetween is formed; and
an optical gap unit in which a fixed mirror facing the movable mirror with a given optical gap therebetween is formed, the optical gap unit, the drive electrode unit, and the movable unit being joined to each other. - View Dependent Claims (2, 3, 4)
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5. A method of manufacturing a tunable optical filter comprising:
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(a) forming a first concave portion in a first substrate, and thereafter forming a drive electrode on the first concave portion so as to form a drive electrode unit;
(b) forming a second concave portion in a second substrate, and thereafter forming a fixed mirror on the second concave portion so as to form an optical gap unit;
(c) joining a third substrate on which an active layer having electrical conductivity, an insulating layer, and a base layer are sequentially deposited, to the drive electrode unit such that the drive electrode faces the active layer, and then removing the base layer and the insulating layer sequentially and forming a movable body in the active layer, and thereafter forming a movable mirror on the movable body; and
(d) joining a structure that has been manufactured in step (c) to the optical gap unit such that the movable mirror faces the fixed mirror. - View Dependent Claims (7, 8, 9, 12)
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6. A method of manufacturing a tunable optical filter comprising:
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(a) forming a first concave portion in a first substrate, and thereafter forming a drive electrode on the first concave portion so as to form a drive electrode unit;
(b) forming a second concave portion in a second substrate, and thereafter forming a fixed mirror on the second concave portion so as to form an optical gap unit;
(c) joining a third substrate on which an active layer having electrical conductivity on which a movable mirror is formed, an insulating layer, and a base layer are sequentially deposited, to the optical gap unit such that the movable mirror faces the fixed mirror, and then removing the base layer and the insulating layer sequentially and forming a movable body in the active layer; and
(d) joining a structure that has been manufactured in step (c), to the drive electrode unit such that the movable body faces the drive electrode. - View Dependent Claims (10, 11, 13, 14, 15)
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Specification