Microelectromechanical strain gauge
First Claim
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1. A microelectromechanical system (MEMS) strain gauge providing measurement of strain of an object, the strain gauge comprising:
- a substrate having a surface attachable to the object;
a longitudinally extending beam;
at least one flexible arm having first and second ends attached to the substrate and having a middle portion supporting the beam above the substrate; and
a detector communicating with the beam for detecting a frequency of vibration of the beam to provide a measure of strain of the object.
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Abstract
A microelectromechanical system (MEMS) strain gauge includes at least one flexible arm that can be caused to oscillate. Transverse strain on the arm changes the resonant frequency of the arm, providing an indication of the transverse strain of the substrate.
34 Citations
41 Claims
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1. A microelectromechanical system (MEMS) strain gauge providing measurement of strain of an object, the strain gauge comprising:
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a substrate having a surface attachable to the object;
a longitudinally extending beam;
at least one flexible arm having first and second ends attached to the substrate and having a middle portion supporting the beam above the substrate; and
a detector communicating with the beam for detecting a frequency of vibration of the beam to provide a measure of strain of the object. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A method for sensing the strain of an object using a MEMS strain gauge including a longitudinally extending beam suspended over a substrate by an arm connected at two separated ends to the substrate along a transverse axis, the method comprising the steps of:
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A) attaching the substrate to the object with the transverse axis aligned with a direction of strain measurement in the object so that strain of the object causes strain in the substrate;
B) providing a momentary force to the arm, thereby causing the arm to vibrate at a frequency, wherein the frequency of vibration is dependent upon the strain of the substrate and object;
C) measuring the frequency of vibration; and
D) based on the measured frequency of vibration, determining the strain of the object. - View Dependent Claims (30)
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26. The method as recited in claim 26, wherein step (B) further comprises causing the arm to vibrate at a resonant frequency.
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27. The method as recited in claim 27, wherein step (C) further comprises measuring the resonant frequency of vibration.
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28. The method as recited in claim 28, wherein step (D) further comprises determining the strain of the object based on the measured resonant frequency of vibration.
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31. A microelectromechanical system (MEMS) strain gauge providing measurement of strain of an object, the strain gauge comprising:
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a substrate having a surface attachable to the object;
at least one flexible arm having first and second ends attached to the substrate, wherein the arm oscillates in response to a stimulus; and
a detector communicating with the arm for detecting a frequency of oscillation of the arm to provide a measure of strain of the object. - View Dependent Claims (32, 33, 34, 35, 36, 37, 38, 39, 40, 41)
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Specification