Method for manufacturing planar optical waveguide
First Claim
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1. :
- A method for manufacturing a planar optical waveguide, comprising the steps of forming a lower cladding layer on a substrate, depositing an optical waveguide layer on the lower cladding layer, patterning the optical waveguide layer, and depositing an upper cladding layer on the patterned waveguide, wherein the optical waveguide layer comprises an inorganic-organic hybrid matrix uniformly doped with photosensitive photochemical monomers, and is selectively exposed to a beam having a predetermined wavelength region, unexposed monomers are removed, and the patterned layer is cured by thermal heating.
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Abstract
A method for manufacturing a planar optical waveguide, includes the steps of coating, over a lower cladding layer, an optical waveguide layer including an inorganic-organic matrix uniformly doped with photosensitive photochemical monomers, selectively exposing the waveguide layer to a beam with a predetermined range of wavelengths so as to immobilize the doped photochemical monomers, and thermally treating the waveguide layer to remove unexposed monomers and cure the exposed optical waveguide layer. Requiring no etching processes, the method can reduce the number of processing steps and produce a planar optical waveguide with a low optical loss.
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10 Claims
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1. :
- A method for manufacturing a planar optical waveguide, comprising the steps of forming a lower cladding layer on a substrate, depositing an optical waveguide layer on the lower cladding layer, patterning the optical waveguide layer, and depositing an upper cladding layer on the patterned waveguide, wherein the optical waveguide layer comprises an inorganic-organic hybrid matrix uniformly doped with photosensitive photochemical monomers, and is selectively exposed to a beam having a predetermined wavelength region, unexposed monomers are removed, and the patterned layer is cured by thermal heating.
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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