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Method and processing system for monitoring status of system components

  • US 20050070104A1
  • Filed: 09/30/2003
  • Published: 03/31/2005
  • Est. Priority Date: 09/30/2003
  • Status: Active Grant
First Claim
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1. A method of monitoring status of a system component in a processing system, the method comprising:

  • exposing a system component to a reactant gas during a process, wherein the reactant gas is capable of etching the system component material to form an erosion product;

    monitoring the processing system for release of the erosion product during the process to determine status of the system component; and

    based upon the status from the monitoring, performing one of the following;

    (a) continuing the exposing and monitoring; and

    (b) stopping the process.

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