System and method for using first-principles simulation to control a semiconductor manufacturing process
First Claim
1. A method of controlling a process performed by a semiconductor processing tool, comprising:
- inputting data relating to a process performed by the semiconductor processing tool;
inputting a first principles physical model relating to the semiconductor processing tool;
performing first principles simulation using the input data and the physical model to provide a first principles simulation result;
using the first principles simulation result to build an empirical model; and
selecting at least one of the first principles simulation result and the empirical model to control the process performed by the semiconductor processing tool.
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Accused Products
Abstract
A method, system and computer readable medium for controlling a process performed by a semiconductor processing tool. The method includes inputting data relating to a process performed by the semiconductor processing tool, inputting a first principles physical model relating to the semiconductor processing tool, performing first principles simulation using the input data and the physical model to provide a first principles simulation result. The first principles simulation result is used to build an empirical model, and at least one of the first principles simulation result and the empirical model is selected to control the process performed by the semiconductor processing tool.
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Citations
58 Claims
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1. A method of controlling a process performed by a semiconductor processing tool, comprising:
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inputting data relating to a process performed by the semiconductor processing tool;
inputting a first principles physical model relating to the semiconductor processing tool;
performing first principles simulation using the input data and the physical model to provide a first principles simulation result;
using the first principles simulation result to build an empirical model; and
selecting at least one of the first principles simulation result and the empirical model to control the process performed by the semiconductor processing tool. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 22, 23, 24, 25, 26, 27)
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21. The method of claim 21, wherein said using remote resources comprises using at least one of remote computational and storage resources via a wide area network to control the semiconductor process performed by the semiconductor processing tool.
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28. A system comprising:
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a semiconductor processing tool configured to perform a process;
an input device configured to input data relating to the process performed by the semiconductor processing tool; and
a first principles simulation processor configured to;
input a first principles physical model relating to the semiconductor processing tool, perform first principles simulation using the input data and the physical model to provide a first principles simulation result, using the first principles simulation result to build an empirical model, wherein at least one of said first principles simulation result and said empirical model is selected to control the process performed by the semiconductor processing tool. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54)
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55. A system for facilitating a process performed by a semiconductor processing tool, comprising:
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means for inputting data relating to a process performed by the semiconductor processing tool;
means for inputting a first principles physical model relating to the semiconductor processing tool;
means for performing first principles simulation using the input data and the physical model to provide a first principles simulation result;
means for using the first principles simulation result to build an empirical model; and
means for selecting at least one of the first principles simulation result and the empirical model to control the process performed by the semiconductor processing tool. - View Dependent Claims (56, 57)
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58. A computer readable medium containing program instructions for execution on a processor, which when executed by the computer system, cause the processor to perform the steps of:
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inputting data relating to a process performed by the semiconductor processing tool;
inputting a first principles physical model relating to the semiconductor processing tool;
performing first principles simulation using the input data and the physical model to provide a first principles simulation result;
using the first principles simulation result to build an empirical model; and
selecting at least one of the first principles simulation result and the empirical model to control the process performed by the semiconductor processing tool.
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Specification