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Substrate processing apparatus and substrate processing method

  • US 20050072358A1
  • Filed: 11/14/2003
  • Published: 04/07/2005
  • Est. Priority Date: 11/15/2002
  • Status: Active Grant
First Claim
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1. A substrate processing apparatus, comprising:

  • a loading/unloading area for carrying in and out a substrate;

    a cleaning area for cleaning the substrate; and

    a plating area for plating the substrate, wherein the loading/unloading area is provided with a substrate transfer robot having a plurality of hands of dry-use design, a loading port for loading a cassette for housing substrates, and a reversing machine of dry-use design for reversing the substrate from face up to face down.

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