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Sputter target having modified surface texture

  • US 20050072668A1
  • Filed: 08/31/2004
  • Published: 04/07/2005
  • Est. Priority Date: 10/06/2003
  • Status: Abandoned Application
First Claim
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1. A sputter target comprising:

  • a sputter area; and

    a non-sputter area having a macroscopic trough pattern.

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