Planar thermal array
First Claim
1. A sensor comprising:
- a substrate;
a pixel situated on a single level on the substrate; and
an electronics circuit situated on the single level.
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Accused Products
Abstract
A thermal sensor structure having one level for an infrared detecting pixel including the sensor associated electronics. The electronics displace a small area thereby having little effect on the fill area of the pixel relative to a level having no pixel electronics. That level has thermally isolation for the substrate through the limited structural attachment to the substrate because of the access vias to the silicon. It has additional isolation because of a pit of removed silicon from the substrate below that one level. The thermal sensor may have an array with a large number of pixels having the one level for the pixels and electronics structure.
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Citations
29 Claims
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1. A sensor comprising:
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a substrate;
a pixel situated on a single level on the substrate; and
an electronics circuit situated on the single level. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A thermal sensor comprising:
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a substrate; and
an array of pixels situated on the substrate; and
wherein;
each pixel is located on a single level;
an electronic circuit is associated with each pixel; and
each electronic circuit is located on the single level with the pixel. - View Dependent Claims (12, 13, 14, 15)
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16. A sensing means comprising:
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means for sensing infrared light;
means for electronically processing signals related to infrared light sensed by the means for sensing infrared light; and
means for supporting on one level the means for sensing infrared light and the means for electronically processing signals. - View Dependent Claims (17, 18, 19, 20, 21, 22)
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23. A sensor comprising:
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a substrate;
a pixel situated in a first plane relative to a surface of the substrate; and
an electronics circuit situated in the first plane.
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24. A thermal sensor comprising:
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a substrate; and
an array of pixels situated on the substrate; and
wherein;
each pixel is located on a first surface;
an electronic circuit is associated with each pixel; and
each electronic circuit is located on the first surface proximate to the pixel.
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25. A thermal sensor comprising:
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a substrate; and
an array of pixels situated on the substrate; and
wherein;
an electronic circuit is associated with each pixel; and
each electronic circuit is situated horizontally proximate to the pixel.
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26. A thermal sensor comprising:
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a substrate; and
an array of pixels situated on the substrate; and
electronics situated on the substrate horizontally proximate to the array of pixels.
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27. A sensing means comprising:
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means for sensing infrared light;
means for electronically processing signals related to infrared light sensed by the means for sensing infrared light; and
means for supporting on one surface the means for sensing infrared light and the means for electronically processing signals.
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28. A sensing means comprising:
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means for sensing infrared light;
means for electronically processing signals related to infrared light sensed by the means for sensing infrared light; and
means for supporting the means for sensing infrared light and the means for electronically processing signals horizontally proximate to each other.
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29. A sensing means comprising:
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means for sensing infrared light;
means for electronically processing signals related to infrared light sensed by the means for sensing infrared light; and
means for supporting in a plane the means for sensing infrared light and the means for electronically processing signals.
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Specification