Electron emitter and method of producing the same
First Claim
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1. An electron emitter comprising:
- a substance comprising a dielectric material serving as an emitter;
a first electrode formed in contact with a first surface of said substance serving as the emitter; and
a second electrode formed in contact with a second surface of said substance serving as the emitter, wherein a gap is formed at least between an outer peripheral portion of said first electrode and said first surface of said substance serving as the emitter;
a base end is formed by contact between said first surface of said substance serving as the emitter and a lower surface of said outer peripheral portion facing said first surface; and
when a drive voltage for inducing polarization reversal of said substance serving as the emitter is applied between said first electrode and said second electrode, electric field concentration occurs at a tip end of said outer peripheral portion and said base end for emitting electrons.
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Abstract
An electron emitter includes an emitter section having a plate shape, a cathode electrode formed on a front surface of the emitter section, and an anode electrode formed on a back surface of the emitter section. A gap is formed between an outer peripheral portion of the cathode electrode and the front surface of the emitter section. The front surface of the emitter section contacts a lower surface of the outer peripheral portion to form a base end as a triple junction. The gap expands from the base end toward a tip end of the outer peripheral portion.
47 Citations
39 Claims
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1. An electron emitter comprising:
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a substance comprising a dielectric material serving as an emitter;
a first electrode formed in contact with a first surface of said substance serving as the emitter; and
a second electrode formed in contact with a second surface of said substance serving as the emitter, wherein a gap is formed at least between an outer peripheral portion of said first electrode and said first surface of said substance serving as the emitter;
a base end is formed by contact between said first surface of said substance serving as the emitter and a lower surface of said outer peripheral portion facing said first surface; and
when a drive voltage for inducing polarization reversal of said substance serving as the emitter is applied between said first electrode and said second electrode, electric field concentration occurs at a tip end of said outer peripheral portion and said base end for emitting electrons. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. An electron emitter comprising:
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a substance comprising a dielectric material serving as an emitter;
a first electrode formed in contact with a first surface of said substance serving as the emitter; and
a second electrode formed in contact with a second surface of said substance serving as the emitter, wherein when said first electrode is projected on said first surface, said second electrode is projected on said second surface, and a projection image of said first electrode and a projection image of said second electrode are compared with each other, the projection image of said second electrode protrudes from the projection image of said first electrode. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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32. A method of producing an electron emitter comprising the steps of:
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forming an upper electrode in contact with an upper surface of a substance comprising a dielectric material serving as an emitter;
forming a lower electrode in contact with a lower surface of said substance serving as the emitter; and
applying a high voltage between said upper electrode and said lower electrode to form a gap at least between an outer peripheral portion of said upper electrode and said upper surface of said substance serving as the emitter. - View Dependent Claims (33, 34, 35, 36, 37)
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38. A method of producing an electron emitter comprising the steps of:
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forming a plurality of lower electrodes on an upper surface of a substrate;
forming a dielectric substance on said upper surface of said substrate to cover said lower electrodes;
forming a plurality of upper electrodes on an upper surface of said dielectric substance at positions corresponding to said lower electrodes, respectively; and
removing part of said dielectric substance which is not interposed between said upper electrodes and said lower electrodes such that the remaining portions of said dielectric substance which are interposed between said upper electrodes and said lower electrodes are formed as substances serving as emitters.
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39. A method of producing a device including a plurality of electron emitters, the method comprising the steps of:
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forming a plurality of dielectric substances on an upper surface of a substrate;
forming the electron emitters on dielectric substances respectively, the electron emitters including substances comprising a dielectric material serving as emitters, upper electrodes formed on upper surfaces of said substances serving as the emitters, and lower electrodes formed on lower surfaces of said substances serving as the emitters, lower surfaces of said lower electrodes being in contact with said upper surfaces of the dielectric substances; and
forming wiring patterns on said upper surface of said substrate, and thereafter, connecting said lower electrodes and said wiring patterns.
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Specification