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Electrostatic capacitance detection device

  • US 20050077911A1
  • Filed: 08/25/2004
  • Published: 04/14/2005
  • Est. Priority Date: 08/29/2003
  • Status: Active Grant
First Claim
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1. An electrostatic capacitance detection device that reads surface contours of a target object by detecting electrostatic capacitance, which changes according to a distance from the target object, comprising:

  • output lines;

    power supply lines;

    M number of row lines, and N number of column lines that are arranged in a matrix of M rows and N columns; and

    an electrostatic capacitance detection element that is formed at intersections between the row lines and column lines;

    the electrostatic capacitance detection element including a signal detection element, a signal amplifying element, a column selection element and a row selection element;

    the signal detection element including a capacitance detecting electrode, a capacitance detecting dielectric layer and a reference capacitor;

    the reference capacitor including a reference capacitor first electrode, a reference capacitor dielectric layer and a reference capacitor second electrode;

    the signal amplifying element, the column selection element and the row selection element being coupled in series and located between an output line and a power supply line; and

    the reference capacitor first electrode being electrically coupled to one of the row lines.

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