High angle micro-mirrors and processes
First Claim
1. A projection system comprising:
- a light source;
a spatial light modulator comprising an array of micro-mirrors;
condensing optics, wherein light from the light source is focused as a cone of light with an axis onto the array of micro-mirrors;
projection optics for projecting light selectively reflected from the array of micro-mirrors;
a controller for selectively actuating micro-mirrors in the array of micro-mirrors;
wherein the array of micro-mirrors comprises a substrate and a plurality of mirror plates disposed in a first state in a plane parallel to the substrate, each mirror plate held on the substrate by a hinge structure that comprises a hinge that is spaced apart from the mirror plate so as to define a gap between the hinge and the mirror plate, wherein the hinge structure and mirror plate are constructed so as to be capable of being actuated from the first state to a second state that is at least 14°
(fourteen degrees) from the first state, and wherein the first axis of the cone of light incident on the micro-mirrors is at an angle relative to a line perpendicular to the plane parallel to the substrate of at least 28 (twenty eight) degrees.
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Accused Products
Abstract
A micro-mirror that comprises a substrate, a hinge structure formed on the substrate and a mirror plate attached to the hinge structure is provided for use in display systems. The mirror plate is capable of rotating from a non-deflected resting state to a state that is at least 14° degrees. In operation, the micro-mirror switches between an “ON”-state and “OFF”-state, which are defined in accordance with a rotational position of the mirror plate. The OFF state can be a non-deflected position of the micro-mirror (generally parallel to the substrate), the same angle (though opposite direction) as the ON state, or an angle less than the ON state (though in the opposite direction). Reflected light from the “ON” and “OFF” states are thus separated and the contrast ratio is improved.
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Citations
37 Claims
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1. A projection system comprising:
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a light source;
a spatial light modulator comprising an array of micro-mirrors;
condensing optics, wherein light from the light source is focused as a cone of light with an axis onto the array of micro-mirrors;
projection optics for projecting light selectively reflected from the array of micro-mirrors;
a controller for selectively actuating micro-mirrors in the array of micro-mirrors;
wherein the array of micro-mirrors comprises a substrate and a plurality of mirror plates disposed in a first state in a plane parallel to the substrate, each mirror plate held on the substrate by a hinge structure that comprises a hinge that is spaced apart from the mirror plate so as to define a gap between the hinge and the mirror plate, wherein the hinge structure and mirror plate are constructed so as to be capable of being actuated from the first state to a second state that is at least 14°
(fourteen degrees) from the first state, and wherein the first axis of the cone of light incident on the micro-mirrors is at an angle relative to a line perpendicular to the plane parallel to the substrate of at least 28 (twenty eight) degrees. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A spatial light modulator for use in a projection system, comprising:
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an array of micro-mirrors, each micro-mirror comprising;
a substrate;
a mirror plate formed on the substrate, the mirror plate having a non-deflected resting state, the mirror plate held on the substrate by a hinge structure that comprises a hinge that is spaced apart from the mirror plate so as to define a gap between the hinge and the mirror plate; and
wherein the mirror plate operates in a binary-mode that includes an ON-state and OFF-state, the ON-state being at least 14°
(fourteen degrees) from the non-deflected resting state. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25)
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26. A projection system comprising:
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a light source;
a spatial light modulator comprising;
a substrate;
an array of mirror plates connected to the substrate via a hinge, wherein the size of the mirror plates is less than 20 microns; and
wherein the mirror plates operate in a binary-mode including an ON state and an OFF state, the ON-state being at least 14°
(sixteen degrees) from a non-deflected resting state of the mirror plates;
a condensing optics, whereby the light from the light source is focused as a cone of light with an axis onto the array of micro-mirrors; and
a projection optics for projecting light selectively reflected from the array of mirror plates. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
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Specification