Electrostatic capacitance detection device
First Claim
1. An electrostatic capacitance detection device that reads surface contours of a target object through detection of electrostatic capacitance which changes according to a distance from the target object, comprising:
- output lines and power-supply lines;
M number of row lines and N number of column lines arranged in a matrix of M rows and N columns; and
an electrostatic capacitance detecting element formed at an intersection of a row line and a column line, the electrostatic capacitance detecting element including a signal detection element, a signal amplifying element, a column selecting element, and a row detecting element, the signal detection element having a capacity detecting electrode, a capacity detecting dielectric layer, and a reference capacitor, the reference capacitor being constituted by a reference capacitor first electrode, a reference capacitor dielectric layer, and a reference capacitor second electrode, the signal amplifying element, the column selecting element, and the row selecting element being coupled in series and arranged between the output line and the power-supply line, and the reference capacitor first electrode and the column line being electrically coupled.
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Accused Products
Abstract
Aspects of the invention provide a superior electrostatic capacitance detecting device. The electrostatic capacitance detection device can include M number of row lines, N number of column lines, and electrostatic capacitance detecting devices formed at intersections of these lines. The electrostatic capacitance detecting element can include a signal detection element, a signal amplifying element, a column selecting element, and a row selecting element, and the signal detection element can include a capacitance detecting electrode, a capacitance detecting dielectric layer, and a reference capacitor, and one electrode of the reference capacitor connects to a column line.
26 Citations
21 Claims
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1. An electrostatic capacitance detection device that reads surface contours of a target object through detection of electrostatic capacitance which changes according to a distance from the target object, comprising:
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output lines and power-supply lines;
M number of row lines and N number of column lines arranged in a matrix of M rows and N columns; and
an electrostatic capacitance detecting element formed at an intersection of a row line and a column line, the electrostatic capacitance detecting element including a signal detection element, a signal amplifying element, a column selecting element, and a row detecting element, the signal detection element having a capacity detecting electrode, a capacity detecting dielectric layer, and a reference capacitor, the reference capacitor being constituted by a reference capacitor first electrode, a reference capacitor dielectric layer, and a reference capacitor second electrode, the signal amplifying element, the column selecting element, and the row selecting element being coupled in series and arranged between the output line and the power-supply line, and the reference capacitor first electrode and the column line being electrically coupled. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification