HOISTING DEVICE FOR USE WITH OVERHEAD TRAVELING CARRIAGE SYSTEM
First Claim
1. An overhead traveling carriage system for use in a semi-conductor fabrication facility, the system including an overhead traveling carriage, the carriage comprising:
- a main body movably engaged with an elevated rail;
a hoisting device including;
an object engager for engaging an object;
a linearly expandable structure coupling the object engager to the main body; and
a hoist for hoisting the object engager.
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Accused Products
Abstract
A hoisting method and device for use in an overhead traveling carriage system are disclosed. The hoisting device includes an engager for engaging an object and a linearly expandable structure coupling the engager to a base point. A single hoist member is coupled at a first end to the engager and at a second end to a motorized drum, coupled to the base point, for substantially vertically retracting and extending the single member. Since a single hoist member is used, the amount of precision machining and technician training are reduced. The linearly expandable structure includes at least one lazy-tong linkage or a telescoping structure, which provides sway stability and compactness. The invention may also include a six-degree adjustment structure that may include a feedback system for use with the linearly expandable structure to provide increased accuracy.
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Citations
20 Claims
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1. An overhead traveling carriage system for use in a
semi-conductor fabrication facility, the system including an overhead traveling carriage, the carriage comprising: -
a main body movably engaged with an elevated rail;
a hoisting device including;
an object engager for engaging an object;
a linearly expandable structure coupling the object engager to the main body; and
a hoist for hoisting the object engager. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of hoisting a wafer holding pod in a semiconductor manufacturing facility, the method comprising the steps of:
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engaging an engager to the wafer holding pod to be hoisted;
hoisting the engager while linearly directing the engager with a linearly expandable structure. - View Dependent Claims (11, 12, 13)
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14. A hoisting device comprising:
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an engager for engaging an object;
a linearly expandable structure coupling the engager to a base point;
a single hoist member coupled at a first end to the engager and at a second end to a motorized drum, coupled to the base point, for substantially vertically retracting and extending the single hoist member; and
an adjustment system for adjusting the position of the linearly expandable structure relative to a load port in greater than two-degrees of motion. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification