HOISTING DEVICE FOR USE WITH OVERHEAD TRAVELING CARRIAGE SYSTEM

• US 20050079041A1
• Filed: 10/13/2003
• Published: 04/14/2005
• Est. Priority Date: 10/13/2003
• Status: Abandoned Application

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Campbell, Philip L., Ziemins, Uldis A., Reyes, Ray A.
• Application Number:
  US10/605,606
• Publication Number:
  US 20050079041A1
• Time in Patent Office: Days
• US Class Current: 414/626
• CPC Class Codes: B66C 13/06 for minimising or preventing longitudinal or transverse swinging of loads
• CPC Class Codes: H01L 21/6773 Conveying cassettes, containers or carriers
• CPC Class Codes: H01L 21/67733 Overhead conveying
• CPC Class Codes: H01L 21/67736 Loading to or unloading from a conveyor
• CPC Class Codes: H01L 21/67775 Docking arrangements
• CPC Class Codes: H01L 21/68707 the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Abstract

A hoisting method and device for use in an overhead traveling carriage system are disclosed. The hoisting device includes an engager for engaging an object and a linearly expandable structure coupling the engager to a base point. A single hoist member is coupled at a first end to the engager and at a second end to a motorized drum, coupled to the base point, for substantially vertically retracting and extending the single member. Since a single hoist member is used, the amount of precision machining and technician training are reduced. The linearly expandable structure includes at least one lazy-tong linkage or a telescoping structure, which provides sway stability and compactness. The invention may also include a six-degree adjustment structure that may include a feedback system for use with the linearly expandable structure to provide increased accuracy.

Claims

1. An overhead traveling carriage system for use in a

semi-conductor fabrication facility, the system including an overhead traveling carriage, the carriage comprising:

a main body movably engaged with an elevated rail;

a hoisting device including;

an object engager for engaging an object;

a linearly expandable structure coupling the object engager to the main body; and

a hoist for hoisting the object engager.

2. The system of claim 1, wherein the linearly expandable structure includes one of:

at least one lazy-tong linkage and a telescoping structure.

3. The system of claim 2, wherein the linearly expandable structure includes at least three lazy-tong linkages.

4. The system of claim 1, wherein the hoist includes a single hoist member coupled at a first end to the object engager and at a second end to a motorized drum, coupled to the main body, for retracting and extending the single hoist member.

5. The system of claim 4, wherein the single hoist member is one of a cable and a belt.

6. The system of claim 1, further comprising a six-degree adjustment system for adjusting the position of the object engager in up to six-degrees of motion.

7. The system of claim 2, further comprising a plurality of sensors for feedback to a controller for adjusting the position of the object engager relative to a load port.

8. The system of claim 2, wherein the adjustment system includes a three-direction adjustment structure allowing adjustment of the object engager in a lateral, yaw and pitch direction relative to a load port.

9. The system of claim 1, wherein the object engager includes at least one of:

a vacuum grasper and a mechanical grasper, for engaging the object for hoisting.

10. A method of hoisting a wafer holding pod in a semiconductor manufacturing facility, the method comprising the steps of:

engaging an engager to the wafer holding pod to be hoisted;

hoisting the engager while linearly directing the engager with a linearly expandable structure.

11. The method of claim 10, wherein the linearly expandable structure includes one of:

at least one lazy-tong linkage and a telescoping structure.

12. The method of claim 10, wherein the hoisting step includes hoisting the wafer holding pod using a single hoist member coupled at a first end to the engager and at a second end to a motorized drum, coupled to a base point, for retracting and extending the single hoist member.

13. The method of claim 12, further comprising the step of controlling the position of the object engager in greater than two-degrees of motion.

14. A hoisting device comprising:

an engager for engaging an object;

a linearly expandable structure coupling the engager to a base point;

a single hoist member coupled at a first end to the engager and at a second end to a motorized drum, coupled to the base point, for substantially vertically retracting and extending the single hoist member; and

an adjustment system for adjusting the position of the linearly expandable structure relative to a load port in greater than two-degrees of motion.

15. The hoisting device of claim 14, wherein the linearly expandable structure includes at least two lazy-tong linkages having respective joints coupled to one another.

16. The hoisting device of claim 15, wherein the linearly expandable structure includes a canopy for enclosing the at least two lazy-tong linkages.

17. The hoisting device of claim 14, wherein the base point is positioned on a main body of an overhead traveling carriage, and the main body is movably engaged with an elevated rail.

18. The hoisting device of claim 14, wherein the adjustment system includes a three-direction adjustment structure allowing adjustment of the linearly expandable structure in a lateral, yaw and pitch direction relative to the load port.

19. The hoisting device of claim 18, wherein the adjustment system further includes a yaw adjuster for adjusting a position of the engager about a substantially vertical axis.

20. The hoisting device of claim 14, further comprising a feedback system for determining the position of the linearly extendable structure.