In-line deposition processes for thin film battery fabrication
First Claim
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1. A method for preparing a thin film battery comprising the steps of:
- a. providing a substrate b. optionally depositing a cathode current collector c. depositing a cathode layer, d. depositing an electrolyte layer e. depositing an anode layer f. optionally depositing an anode current collector layer;
g. optionally depositing an encapsulant layer;
wherein at least one of said layers is vapor deposited through a flexible, repositionable, polymeric shadow mask.
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Abstract
In one embodiment, the invention is directed to aperture mask deposition techniques using aperture mask patterns formed in one or more elongated webs of flexible film. The techniques involve sequentially depositing material through mask patterns formed in the film to define layers, or portions of layers, of the thin film battery. A deposition substrate can also be formed from an elongated web, and the deposition substrate web can be fed through a series of deposition stations.
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42 Claims
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1. A method for preparing a thin film battery comprising the steps of:
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a. providing a substrate b. optionally depositing a cathode current collector c. depositing a cathode layer, d. depositing an electrolyte layer e. depositing an anode layer f. optionally depositing an anode current collector layer;
g. optionally depositing an encapsulant layer;
wherein at least one of said layers is vapor deposited through a flexible, repositionable, polymeric shadow mask. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41)
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42. A mask set for producing a thin film battery comprising a first aperture mask formed with a first pattern of deposition apertures that define at least part of an anode layer, a second aperture mask formed with a second pattern of deposition apertures that define at least part of a cathode layer, and a third aperture mask formed with a third pattern of deposition apertures that define at least part of an electrolyte layer.
Specification