Humidity sensor element, device and method for manufacturing thereof
First Claim
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1. A humidity sensor element, comprising:
- a substrate having a nanocomposite film containing carbon nanotube and perfluorinated polymer with acid functional group as sensing material; and
at least a pair of electrodes which contact with said sensing material at one or both side(s);
wherein the mixing ratio of carbon nanotube to perfluorinated polymer with acid functional groups is 0.01-20 by weight.
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Abstract
A humidity sensor element, a humidity sensor device and a method for manufacturing thereof are provided. The humidity sensor element includes a substrate having a nanocomposite film as sensing material, wherein said nanocomposite film consists of carbon nanotube/perfluorinated polymer with acid functional groups in weight ratio of 0.01-20; and at least a pair of electrodes, which contact with the sensing material at one or both side(s). The nanocomposite film increases the sensitivity of humidity sensor element such that even an infinitesimal amount of moisture can be detected with minimum detection limit of 15.76 ppmv
35 Citations
20 Claims
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1. A humidity sensor element, comprising:
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a substrate having a nanocomposite film containing carbon nanotube and perfluorinated polymer with acid functional group as sensing material; and
at least a pair of electrodes which contact with said sensing material at one or both side(s);
wherein the mixing ratio of carbon nanotube to perfluorinated polymer with acid functional groups is 0.01-20 by weight. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A humidity sensor device, comprising:
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a humidity sensor element containing a substrate having a nanocomposite film containing carbon nanotube and perfluorinated polymer with acid functional group as sensing material and at least a pair of electrodes, wherein the mixing ratio of carbon nanotube to perfluorinated polymer with acid functional groups is 0.01-20 by weight, and said electrodes contact with said sensing material at one or both side(s);
a testing chamber, wherein said humidity sensor element is disposed therein;
an electron oscillator circuit, which provides oscillating electric field to the humidity sensor element to produce mechanical oscillation; and
a frequency calculator, which can measure the oscillation frequency change of said humidity sensor element. - View Dependent Claims (9, 10, 11, 12, 13)
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14. A method for manufacturing humidity sensor element, comprising the steps of:
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providing a substrate;
disposing at least a pair of electrodes on said substrate;
mixing carbon nanotube and perfluorinated polymer solution with acid functional groups;
coating said nanotube/perfluorinated polymer mixture solution on said electrodes by means of spin-coating method; and
drying said mixture solution to form a humidity sensor element having a nanocomposite film. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification